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- W1870108615 abstract "Tetragonal yttria stabilized zirconia (YSZ) films were deposited on a silicon dioxide substrate by rf magnetron sputtering. Films were characterized by X-ray diffraction, RHEED and AFM. The X-ray diffraction peaks depended on the substrate temperature, and the highest peak was observed for films deposited at 400/spl deg/C. The temperature dependence of resistance was measured. The resistance of the YSZ film decreased rapidly with increasing temperature. An oxygen sensor with a planar structure was fabricated on a single crystal silicon wafer using the tetragonal YSZ film. The sensor showed well defined limiting-current characteristics and a sensitivity of 7.5 /spl mu/A/% at 20 mTorr." @default.
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- W1870108615 date "2002-11-19" @default.
- W1870108615 modified "2023-09-25" @default.
- W1870108615 title "Preparation and property of tetragonal zirconia thin films for oxygen sensor" @default.
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- W1870108615 doi "https://doi.org/10.1109/iemt.1995.541018" @default.
- W1870108615 hasPublicationYear "2002" @default.
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