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• W1871078566 endingPage "310" @default.
• W1871078566 startingPage "293" @default.
• W1871078566 abstract "AbstractThe following chapter is an overview of processing fused silica and other transparent materials by pulsed-laser irradiation: (1) Direct excitation of materials with multi-wavelength excitation processes, and (2) Media-assisted process with a conventional pulsed laser. A method to etch transparent materials by using laserinduced plasma-assisted ablation (LIPAA), or laser-induced backside wet etching (LIBWE), has been described in detail.KeywordsFemtosecond LaserSilica GlassRear SurfaceTransparent MaterialPhase MaskThese keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves." @default.
• W1871078566 created "2016-06-24" @default.
• W1871078566 creator A5031149146 @default.
• W1871078566 date "2010-01-01" @default.
• W1871078566 modified "2023-09-24" @default.
• W1871078566 title "Hybrid Laser Processing of Transparent Materials" @default.
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