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- W1873073909 abstract "An enhanced xenon plasma electron flood gun (PEF-Xe) used in a GSD-200E/sup 2/ ion implanter is characterized by means of various wafer test structures. High dose/beam current implants are performed under different PEF settings to investigate the charge neutralization capability of the tool. Q/sub BD/, FLASH, SPIDER and CHARM/sup TM/-2 test structures are used to explore a range of operating conditions for high beam current arsenic implants." @default.
- W1873073909 created "2016-06-24" @default.
- W1873073909 creator A5009231449 @default.
- W1873073909 creator A5031188829 @default.
- W1873073909 creator A5037684383 @default.
- W1873073909 creator A5053466620 @default.
- W1873073909 date "2003-07-10" @default.
- W1873073909 modified "2023-09-25" @default.
- W1873073909 title "Characterization of a Xenon plasma electron flood gun on a GSD-200E/sup 2/ high current implanter using Q/sub BD/, FLASH, SPIDER, and CHARM/sup TM/-2 wafers" @default.
- W1873073909 cites W2058756634 @default.
- W1873073909 cites W2114135540 @default.
- W1873073909 cites W2126545376 @default.
- W1873073909 doi "https://doi.org/10.1109/iit.2000.924212" @default.
- W1873073909 hasPublicationYear "2003" @default.
- W1873073909 type Work @default.
- W1873073909 sameAs 1873073909 @default.
- W1873073909 citedByCount "2" @default.
- W1873073909 crossrefType "proceedings-article" @default.
- W1873073909 hasAuthorship W1873073909A5009231449 @default.
- W1873073909 hasAuthorship W1873073909A5031188829 @default.
- W1873073909 hasAuthorship W1873073909A5037684383 @default.
- W1873073909 hasAuthorship W1873073909A5053466620 @default.
- W1873073909 hasConcept C113196181 @default.
- W1873073909 hasConcept C120665830 @default.
- W1873073909 hasConcept C121332964 @default.
- W1873073909 hasConcept C145148216 @default.
- W1873073909 hasConcept C160671074 @default.
- W1873073909 hasConcept C168834538 @default.
- W1873073909 hasConcept C178790620 @default.
- W1873073909 hasConcept C184779094 @default.
- W1873073909 hasConcept C185544564 @default.
- W1873073909 hasConcept C185592680 @default.
- W1873073909 hasConcept C192562407 @default.
- W1873073909 hasConcept C41823505 @default.
- W1873073909 hasConcept C43617362 @default.
- W1873073909 hasConcept C49040817 @default.
- W1873073909 hasConcept C548442186 @default.
- W1873073909 hasConcept C82706917 @default.
- W1873073909 hasConceptScore W1873073909C113196181 @default.
- W1873073909 hasConceptScore W1873073909C120665830 @default.
- W1873073909 hasConceptScore W1873073909C121332964 @default.
- W1873073909 hasConceptScore W1873073909C145148216 @default.
- W1873073909 hasConceptScore W1873073909C160671074 @default.
- W1873073909 hasConceptScore W1873073909C168834538 @default.
- W1873073909 hasConceptScore W1873073909C178790620 @default.
- W1873073909 hasConceptScore W1873073909C184779094 @default.
- W1873073909 hasConceptScore W1873073909C185544564 @default.
- W1873073909 hasConceptScore W1873073909C185592680 @default.
- W1873073909 hasConceptScore W1873073909C192562407 @default.
- W1873073909 hasConceptScore W1873073909C41823505 @default.
- W1873073909 hasConceptScore W1873073909C43617362 @default.
- W1873073909 hasConceptScore W1873073909C49040817 @default.
- W1873073909 hasConceptScore W1873073909C548442186 @default.
- W1873073909 hasConceptScore W1873073909C82706917 @default.
- W1873073909 hasLocation W18730739091 @default.
- W1873073909 hasOpenAccess W1873073909 @default.
- W1873073909 hasPrimaryLocation W18730739091 @default.
- W1873073909 hasRelatedWork W1968889750 @default.
- W1873073909 hasRelatedWork W2000359924 @default.
- W1873073909 hasRelatedWork W2006989208 @default.
- W1873073909 hasRelatedWork W2033001893 @default.
- W1873073909 hasRelatedWork W2050258245 @default.
- W1873073909 hasRelatedWork W2123712895 @default.
- W1873073909 hasRelatedWork W2130556351 @default.
- W1873073909 hasRelatedWork W2170465541 @default.
- W1873073909 hasRelatedWork W3146682438 @default.
- W1873073909 hasRelatedWork W4250705318 @default.
- W1873073909 isParatext "false" @default.
- W1873073909 isRetracted "false" @default.
- W1873073909 magId "1873073909" @default.
- W1873073909 workType "article" @default.