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- W1873455909 abstract "In this paper we present the fabrication and characterization of low loss buried channel waveguides in porous silicon (PS), designed to work around 1.55 /spl mu/m, and obtained for the first time by direct laser writing. This novel technique, derived from the laser ablation, is a good alternative to the traditional photolithographic process. In fact, owing to the low thermal conductivity of PS, the high temperatures required for the writing are achievable with low power lasers, making the process highly efficient and possible with the standard equipment present in most laboratories." @default.
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- W1873455909 date "2002-11-07" @default.
- W1873455909 modified "2023-09-25" @default.
- W1873455909 title "Low loss laser-written channel waveguides in porous silicon" @default.
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- W1873455909 doi "https://doi.org/10.1109/leos.2000.894077" @default.
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