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• W1874002458 abstract "In order to take advantage of diamond and carbon coatings on flat-panel displays, unscratched sharp Si microtip arrays have been carburized based on the bias enhanced nucleation (BEN) and low-pressure MPCVD deposition to obtain an ultra-sharp carburized Si FEAs. The tip radii of these BEN-carburized Si tips can be reduced below 300 /spl Aring/ under low deposition temperature (<550/spl deg/C). Furthermore, some BEN-carburized samples were further deposited by normal diamond growth conditions to form the ultra-sharp DLC-clad Si FEAs with enhanced emission ability." @default.
• W1874002458 created "2016-06-24" @default.
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• W1874002458 date "2002-12-24" @default.
• W1874002458 modified "2023-09-24" @default.
• W1874002458 title "Fabrication and characterization of various carbon-clad silicon microtips with ultra-small tip radii" @default.
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• W1874002458 doi "https://doi.org/10.1109/ivmc.1996.601835" @default.
• W1874002458 hasPublicationYear "2002" @default.
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