FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1874127054> ?p ?o ?g. }

• W1874127054 abstract "Abstract In this paper, we carried out the two-dimensional (2D) strain measurement in sub-10 nm SiGe layer; images were obtained by dark-field electron holography (DFEH). This technique is based on transmission electron microscopy (TEM), in which dark-field holograms were obtained from a (400) diffraction spot. The measured results were compared to the X-ray diffraction (XRD) results in terms of the strain value and the depth of strain distribution in a very thin SiGe layer. Subsequently, we were able to successfully analyze the 2D strain maps along the [100] growth direction of the nanoscale SiGe region. The strain was measured and found to be in the range of 1.8–2.4%. The strain precision was estimated at 2.5 × 10 −3 . As a result, the DFEH technique is truly useful for measuring 2D strain maps in very thin SiGe layers with nanometer resolution and high precision." @default.
• W1874127054 created "2016-06-24" @default.
• W1874127054 creator A5015308460 @default.
• W1874127054 creator A5023159329 @default.
• W1874127054 creator A5029445561 @default.
• W1874127054 creator A5030573005 @default.
• W1874127054 creator A5062283465 @default.
• W1874127054 creator A5065877264 @default.
• W1874127054 creator A5069825714 @default.
• W1874127054 creator A5089578735 @default.
• W1874127054 date "2015-11-01" @default.
• W1874127054 modified "2023-10-18" @default.
• W1874127054 title "2D strain measurement in sub-10 nm SiGe layer with dark-field electron holography" @default.
• W1874127054 cites W1992325505 @default.
• W1874127054 cites W2005511055 @default.
• W1874127054 cites W2006307132 @default.
• W1874127054 cites W2007785962 @default.
• W1874127054 cites W2013177409 @default.
• W1874127054 cites W2013266455 @default.
• W1874127054 cites W2027088507 @default.
• W1874127054 cites W2040974883 @default.
• W1874127054 cites W2049848506 @default.
• W1874127054 cites W2060940477 @default.
• W1874127054 cites W2064294844 @default.
• W1874127054 cites W2074069591 @default.
• W1874127054 cites W2077206690 @default.
• W1874127054 cites W2077375015 @default.
• W1874127054 cites W2083281014 @default.
• W1874127054 cites W2092740353 @default.
• W1874127054 cites W2093592974 @default.
• W1874127054 cites W2094382343 @default.
• W1874127054 cites W2137324716 @default.
• W1874127054 cites W3140593370 @default.
• W1874127054 cites W977278669 @default.
• W1874127054 doi "https://doi.org/10.1016/j.cap.2015.09.001" @default.
• W1874127054 hasPublicationYear "2015" @default.
• W1874127054 type Work @default.
• W1874127054 sameAs 1874127054 @default.
• W1874127054 citedByCount "1" @default.
• W1874127054 countsByYear W18741270542016 @default.
• W1874127054 crossrefType "journal-article" @default.
• W1874127054 hasAuthorship W1874127054A5015308460 @default.
• W1874127054 hasAuthorship W1874127054A5023159329 @default.
• W1874127054 hasAuthorship W1874127054A5029445561 @default.
• W1874127054 hasAuthorship W1874127054A5030573005 @default.
• W1874127054 hasAuthorship W1874127054A5062283465 @default.
• W1874127054 hasAuthorship W1874127054A5065877264 @default.
• W1874127054 hasAuthorship W1874127054A5069825714 @default.
• W1874127054 hasAuthorship W1874127054A5089578735 @default.
• W1874127054 hasConcept C120665830 @default.
• W1874127054 hasConcept C121332964 @default.
• W1874127054 hasConcept C126322002 @default.
• W1874127054 hasConcept C138268822 @default.
• W1874127054 hasConcept C146088050 @default.
• W1874127054 hasConcept C147080431 @default.
• W1874127054 hasConcept C154945302 @default.
• W1874127054 hasConcept C159985019 @default.
• W1874127054 hasConcept C161368742 @default.
• W1874127054 hasConcept C171250308 @default.
• W1874127054 hasConcept C187590223 @default.
• W1874127054 hasConcept C192562407 @default.
• W1874127054 hasConcept C202444582 @default.
• W1874127054 hasConcept C207114421 @default.
• W1874127054 hasConcept C2776451378 @default.
• W1874127054 hasConcept C2778022156 @default.
• W1874127054 hasConcept C2779227376 @default.
• W1874127054 hasConcept C33923547 @default.
• W1874127054 hasConcept C41008148 @default.
• W1874127054 hasConcept C49040817 @default.
• W1874127054 hasConcept C53120450 @default.
• W1874127054 hasConcept C71924100 @default.
• W1874127054 hasConcept C77066764 @default.
• W1874127054 hasConcept C77557913 @default.
• W1874127054 hasConcept C9652623 @default.
• W1874127054 hasConceptScore W1874127054C120665830 @default.
• W1874127054 hasConceptScore W1874127054C121332964 @default.
• W1874127054 hasConceptScore W1874127054C126322002 @default.
• W1874127054 hasConceptScore W1874127054C138268822 @default.
• W1874127054 hasConceptScore W1874127054C146088050 @default.
• W1874127054 hasConceptScore W1874127054C147080431 @default.
• W1874127054 hasConceptScore W1874127054C154945302 @default.
• W1874127054 hasConceptScore W1874127054C159985019 @default.
• W1874127054 hasConceptScore W1874127054C161368742 @default.
• W1874127054 hasConceptScore W1874127054C171250308 @default.
• W1874127054 hasConceptScore W1874127054C187590223 @default.
• W1874127054 hasConceptScore W1874127054C192562407 @default.
• W1874127054 hasConceptScore W1874127054C202444582 @default.
• W1874127054 hasConceptScore W1874127054C207114421 @default.
• W1874127054 hasConceptScore W1874127054C2776451378 @default.
• W1874127054 hasConceptScore W1874127054C2778022156 @default.
• W1874127054 hasConceptScore W1874127054C2779227376 @default.
• W1874127054 hasConceptScore W1874127054C33923547 @default.
• W1874127054 hasConceptScore W1874127054C41008148 @default.
• W1874127054 hasConceptScore W1874127054C49040817 @default.
• W1874127054 hasConceptScore W1874127054C53120450 @default.
• W1874127054 hasConceptScore W1874127054C71924100 @default.
• W1874127054 hasConceptScore W1874127054C77066764 @default.
• W1874127054 hasConceptScore W1874127054C77557913 @default.
• W1874127054 hasConceptScore W1874127054C9652623 @default.
• W1874127054 hasFunder F4320321681 @default.

• next