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• W1876337511 endingPage "N5053" @default.
• W1876337511 startingPage "N5041" @default.
• W1876337511 abstract "The ability to achieve near-atomic precision in etching different materials when transferring lithographically defined templates is a requirement of increasing importance for nanoscale structure fabrication in the semiconductor and related industries. The use of ultra-thin gate dielectrics, ultra thin channels, and sub-20 nm film thicknesses in field effect transistors and other devices requires near-atomic scale etching control and selectivity. There is an emerging consensus that as critical dimensions approach the sub-10 nm scale, the need for an etching method corresponding to Atomic Layer Deposition (ALD), i.e. Atomic Layer Etching (ALE), has become essential, and that the more than 30-year quest to complement/replace continuous directional plasma etching (PE) methods for critical applications by a sequence of individual, self-limited surface reaction steps has reached a crucial stage. A key advantage of this approach relative to continuous PE is that it enables optimization of the individual steps with regard to reactant adsorption, self-limited etching, selectivity relative to other materials, and damage of critical surface layers. In this overview we present basic approaches to ALE of materials, discuss similarities/crucial differences relative to thermal and plasma-enhanced ALD, and then review selected results on ALE of materials aimed at pattern transfer. The overview concludes with a discussion of opportunities and challenges ahead." @default.
• W1876337511 created "2016-06-24" @default.
• W1876337511 creator A5058031028 @default.
• W1876337511 creator A5088251109 @default.
• W1876337511 creator A5089034106 @default.
• W1876337511 date "2015-01-01" @default.
• W1876337511 modified "2023-10-18" @default.
• W1876337511 title "Atomic Layer Etching at the Tipping Point: An Overview" @default.
• W1876337511 cites W1680053728 @default.
• W1876337511 cites W1890132560 @default.
• W1876337511 cites W1964537084 @default.
• W1876337511 cites W1967709316 @default.
• W1876337511 cites W1969475168 @default.
• W1876337511 cites W1969621395 @default.
• W1876337511 cites W1969852806 @default.
• W1876337511 cites W1970819096 @default.
• W1876337511 cites W1973061894 @default.
• W1876337511 cites W1975154087 @default.
• W1876337511 cites W1977093670 @default.
• W1876337511 cites W1978527904 @default.
• W1876337511 cites W1979451842 @default.
• W1876337511 cites W1980412805 @default.
• W1876337511 cites W1984277026 @default.
• W1876337511 cites W1984648376 @default.
• W1876337511 cites W1984697825 @default.
• W1876337511 cites W1985279240 @default.
• W1876337511 cites W1986643359 @default.
• W1876337511 cites W1988706967 @default.
• W1876337511 cites W1989464087 @default.
• W1876337511 cites W1990699704 @default.
• W1876337511 cites W1993243846 @default.
• W1876337511 cites W1994069792 @default.
• W1876337511 cites W1994586786 @default.
• W1876337511 cites W1995060919 @default.
• W1876337511 cites W1996894177 @default.
• W1876337511 cites W1997656960 @default.
• W1876337511 cites W1998541581 @default.
• W1876337511 cites W2000399637 @default.
• W1876337511 cites W2000461969 @default.
• W1876337511 cites W2002216049 @default.
• W1876337511 cites W2006899770 @default.
• W1876337511 cites W2008074288 @default.
• W1876337511 cites W2008336548 @default.
• W1876337511 cites W2008464274 @default.
• W1876337511 cites W2010544036 @default.
• W1876337511 cites W2010569326 @default.
• W1876337511 cites W2013302159 @default.
• W1876337511 cites W2015495124 @default.
• W1876337511 cites W2017598082 @default.
• W1876337511 cites W2018422439 @default.
• W1876337511 cites W2019579242 @default.
• W1876337511 cites W2019629289 @default.
• W1876337511 cites W2019804329 @default.
• W1876337511 cites W2023718213 @default.
• W1876337511 cites W2025045650 @default.
• W1876337511 cites W2025164276 @default.
• W1876337511 cites W2027599878 @default.
• W1876337511 cites W2028344601 @default.
• W1876337511 cites W2029718382 @default.
• W1876337511 cites W2030394866 @default.
• W1876337511 cites W2030982349 @default.
• W1876337511 cites W2032247708 @default.
• W1876337511 cites W2032415425 @default.
• W1876337511 cites W2033182420 @default.
• W1876337511 cites W2033248441 @default.
• W1876337511 cites W2033599397 @default.
• W1876337511 cites W2035120818 @default.
• W1876337511 cites W2036266711 @default.
• W1876337511 cites W2036327002 @default.
• W1876337511 cites W2038493283 @default.
• W1876337511 cites W2038701336 @default.
• W1876337511 cites W2039435105 @default.
• W1876337511 cites W2040730470 @default.
• W1876337511 cites W2041143206 @default.
• W1876337511 cites W2041399685 @default.
• W1876337511 cites W2042574896 @default.
• W1876337511 cites W2044368587 @default.
• W1876337511 cites W2044454990 @default.
• W1876337511 cites W2044868379 @default.
• W1876337511 cites W2045570781 @default.
• W1876337511 cites W2047364574 @default.
• W1876337511 cites W2048305225 @default.
• W1876337511 cites W2048389734 @default.
• W1876337511 cites W2050358690 @default.
• W1876337511 cites W2050831093 @default.
• W1876337511 cites W2053301477 @default.
• W1876337511 cites W2055224411 @default.
• W1876337511 cites W2055702928 @default.
• W1876337511 cites W2055935608 @default.
• W1876337511 cites W2056058227 @default.
• W1876337511 cites W2056889600 @default.
• W1876337511 cites W2056938791 @default.
• W1876337511 cites W2059997046 @default.
• W1876337511 cites W2060103407 @default.
• W1876337511 cites W2061930543 @default.
• W1876337511 cites W2062824111 @default.
• W1876337511 cites W2063058287 @default.
• W1876337511 cites W2063286727 @default.

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