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- W1880375980 abstract "In this paper we first motivate the use of autonomous micro-sensor arrays for use in semiconductor manufacturing. Following this, we discuss three critical issues that must be addressed in order to realize our goal of building these micro-sensor arrays. We then describe our on-going development efforts of fabricating spatially resolved etch-rate and temperature sensors." @default.
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- W1880375980 date "2003-01-20" @default.
- W1880375980 modified "2023-09-27" @default.
- W1880375980 title "Micro-sensor arrays for calibration, control, and monitoring of semiconductor manufacturing processes" @default.
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- W1880375980 doi "https://doi.org/10.1109/cca.1999.807761" @default.
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