Matches in SemOpenAlex for { <https://semopenalex.org/work/W1881500241> ?p ?o ?g. }
Showing items 1 to 62 of
62
with 100 items per page.
- W1881500241 abstract "This paper describes measurement of the energy consumption of diffusion furnaces and proceeds to propose several methods for energy saving. Measurements showed that cooling water consumes 71% of the energy, exhaust air 11% and dry coil (heat transferred to clean room air) 18%. In terms of cost (in Yen), cooling water accounts for 32%, exhaust air 46% and dry coil 22%. Proposals are raised for reducing the energy consumption of the furnace to less than a half of conventional ones by: employment of double layer cooler; replacement of exhaust from clean room air by partially treated air; and employment of heat insulation material for the furnace casing." @default.
- W1881500241 created "2016-06-24" @default.
- W1881500241 creator A5012922492 @default.
- W1881500241 creator A5019174939 @default.
- W1881500241 creator A5062715209 @default.
- W1881500241 date "2003-01-20" @default.
- W1881500241 modified "2023-09-23" @default.
- W1881500241 title "A proposal for energy saving in semiconductor fabs" @default.
- W1881500241 doi "https://doi.org/10.1109/issm.1999.808784" @default.
- W1881500241 hasPublicationYear "2003" @default.
- W1881500241 type Work @default.
- W1881500241 sameAs 1881500241 @default.
- W1881500241 citedByCount "3" @default.
- W1881500241 crossrefType "proceedings-article" @default.
- W1881500241 hasAuthorship W1881500241A5012922492 @default.
- W1881500241 hasAuthorship W1881500241A5019174939 @default.
- W1881500241 hasAuthorship W1881500241A5062715209 @default.
- W1881500241 hasConcept C119599485 @default.
- W1881500241 hasConcept C127413603 @default.
- W1881500241 hasConcept C192562407 @default.
- W1881500241 hasConcept C2780165032 @default.
- W1881500241 hasConcept C30399818 @default.
- W1881500241 hasConcept C30403606 @default.
- W1881500241 hasConcept C39432304 @default.
- W1881500241 hasConcept C548081761 @default.
- W1881500241 hasConcept C78519656 @default.
- W1881500241 hasConceptScore W1881500241C119599485 @default.
- W1881500241 hasConceptScore W1881500241C127413603 @default.
- W1881500241 hasConceptScore W1881500241C192562407 @default.
- W1881500241 hasConceptScore W1881500241C2780165032 @default.
- W1881500241 hasConceptScore W1881500241C30399818 @default.
- W1881500241 hasConceptScore W1881500241C30403606 @default.
- W1881500241 hasConceptScore W1881500241C39432304 @default.
- W1881500241 hasConceptScore W1881500241C548081761 @default.
- W1881500241 hasConceptScore W1881500241C78519656 @default.
- W1881500241 hasLocation W18815002411 @default.
- W1881500241 hasOpenAccess W1881500241 @default.
- W1881500241 hasPrimaryLocation W18815002411 @default.
- W1881500241 hasRelatedWork W1786363395 @default.
- W1881500241 hasRelatedWork W2116355206 @default.
- W1881500241 hasRelatedWork W2816484327 @default.
- W1881500241 hasRelatedWork W2820501751 @default.
- W1881500241 hasRelatedWork W2820617847 @default.
- W1881500241 hasRelatedWork W2823118042 @default.
- W1881500241 hasRelatedWork W2825044471 @default.
- W1881500241 hasRelatedWork W2831164014 @default.
- W1881500241 hasRelatedWork W2844907289 @default.
- W1881500241 hasRelatedWork W2854096211 @default.
- W1881500241 hasRelatedWork W2854838909 @default.
- W1881500241 hasRelatedWork W2867962034 @default.
- W1881500241 hasRelatedWork W2868940933 @default.
- W1881500241 hasRelatedWork W2871525603 @default.
- W1881500241 hasRelatedWork W2874397029 @default.
- W1881500241 hasRelatedWork W2876758497 @default.
- W1881500241 hasRelatedWork W2877821072 @default.
- W1881500241 hasRelatedWork W2882759411 @default.
- W1881500241 hasRelatedWork W2979058439 @default.
- W1881500241 hasRelatedWork W3148155728 @default.
- W1881500241 isParatext "false" @default.
- W1881500241 isRetracted "false" @default.
- W1881500241 magId "1881500241" @default.
- W1881500241 workType "article" @default.