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- W188257727 abstract "We develop an uncooled infrared imaging device that contains a SiN-Au bimaterial micro-cantilever arrays detector and an optical read-out section. The detector converts the incident infrared radiation to the cantilever inclination angles, and the optical read-out section converts these angles directly to a visible image through anoptical filtering operation to the spectra of the cantilever arrays with a knife-edge filter. The present results with the 140 × 98 cantilever arrays and the 8-bit A/D quantizer suggest that the objects at the temperature of 250℃ at the distance as far as 1 m can be detected and the noise-equivalent temperature difference (NETD) of the device is about 10K. The further improvement of NETD is expected to approach about 14 mK with the optimized cantilever design and 12-bit quantizer." @default.
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- W188257727 date "2003-01-01" @default.
- W188257727 modified "2023-09-24" @default.
- W188257727 title "Uncooled Optically Readable Bimaterial Micro-Cantilever Infrared Imaging Device" @default.
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