Matches in SemOpenAlex for { <https://semopenalex.org/work/W1883398051> ?p ?o ?g. }
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95
with 100 items per page.
- W1883398051 endingPage "243" @default.
- W1883398051 startingPage "241" @default.
- W1883398051 abstract "Depth profiling SIMS analysis to determine diffusion of an element from a surface layer into a substrate or penetration of a species through a barrier layer can be very difficult to achieve because one cannot readily detect a trace amount of an element after depth profiling through a matrix level of the same element. Removal of the substrate and analysis from the back of the sample has provided a solution to this problem. Substrate removal methods have been either mechanical polish followed by a chemical etch or mechanical polish alone. The latter method has provided successful results for a wide range of studies including penetration of Cu though a barrier material, diffusion from high-k dielectric layers, and site specific analysis on a product wafer. In order to make the polishing method more routine and reduce the time required, substrate removal was investigated with use of a milling machine designed to de-process packaged semiconductor devices. Initial work on an Si substrate shows residual Si less than 100 nm could be obtained in a region that was subsequently analyzed with good depth resolution in a SIMS depth profile. Mesa sample preparation with this instrument was also demonstrated. Copyright © 2014 John Wiley & Sons, Ltd." @default.
- W1883398051 created "2016-06-24" @default.
- W1883398051 creator A5022786337 @default.
- W1883398051 creator A5033888400 @default.
- W1883398051 creator A5034000252 @default.
- W1883398051 creator A5043920891 @default.
- W1883398051 date "2014-03-21" @default.
- W1883398051 modified "2023-10-16" @default.
- W1883398051 title "Back side SIMS analysis" @default.
- W1883398051 cites W1975024144 @default.
- W1883398051 cites W2014974857 @default.
- W1883398051 cites W2024508519 @default.
- W1883398051 cites W2051517866 @default.
- W1883398051 cites W2055073304 @default.
- W1883398051 cites W2056482876 @default.
- W1883398051 cites W2125595907 @default.
- W1883398051 cites W2315944854 @default.
- W1883398051 doi "https://doi.org/10.1002/sia.5470" @default.
- W1883398051 hasPublicationYear "2014" @default.
- W1883398051 type Work @default.
- W1883398051 sameAs 1883398051 @default.
- W1883398051 citedByCount "1" @default.
- W1883398051 countsByYear W18833980512019 @default.
- W1883398051 crossrefType "journal-article" @default.
- W1883398051 hasAuthorship W1883398051A5022786337 @default.
- W1883398051 hasAuthorship W1883398051A5033888400 @default.
- W1883398051 hasAuthorship W1883398051A5034000252 @default.
- W1883398051 hasAuthorship W1883398051A5043920891 @default.
- W1883398051 hasConcept C111368507 @default.
- W1883398051 hasConcept C113196181 @default.
- W1883398051 hasConcept C120665830 @default.
- W1883398051 hasConcept C121332964 @default.
- W1883398051 hasConcept C127313418 @default.
- W1883398051 hasConcept C127413603 @default.
- W1883398051 hasConcept C138113353 @default.
- W1883398051 hasConcept C159985019 @default.
- W1883398051 hasConcept C160671074 @default.
- W1883398051 hasConcept C162356407 @default.
- W1883398051 hasConcept C180088628 @default.
- W1883398051 hasConcept C185592680 @default.
- W1883398051 hasConcept C192562407 @default.
- W1883398051 hasConcept C193493375 @default.
- W1883398051 hasConcept C2777289219 @default.
- W1883398051 hasConcept C2778576202 @default.
- W1883398051 hasConcept C2778836790 @default.
- W1883398051 hasConcept C2779227376 @default.
- W1883398051 hasConcept C42475967 @default.
- W1883398051 hasConcept C43617362 @default.
- W1883398051 hasConcept C49040817 @default.
- W1883398051 hasConcept C77671233 @default.
- W1883398051 hasConcept C80107235 @default.
- W1883398051 hasConceptScore W1883398051C111368507 @default.
- W1883398051 hasConceptScore W1883398051C113196181 @default.
- W1883398051 hasConceptScore W1883398051C120665830 @default.
- W1883398051 hasConceptScore W1883398051C121332964 @default.
- W1883398051 hasConceptScore W1883398051C127313418 @default.
- W1883398051 hasConceptScore W1883398051C127413603 @default.
- W1883398051 hasConceptScore W1883398051C138113353 @default.
- W1883398051 hasConceptScore W1883398051C159985019 @default.
- W1883398051 hasConceptScore W1883398051C160671074 @default.
- W1883398051 hasConceptScore W1883398051C162356407 @default.
- W1883398051 hasConceptScore W1883398051C180088628 @default.
- W1883398051 hasConceptScore W1883398051C185592680 @default.
- W1883398051 hasConceptScore W1883398051C192562407 @default.
- W1883398051 hasConceptScore W1883398051C193493375 @default.
- W1883398051 hasConceptScore W1883398051C2777289219 @default.
- W1883398051 hasConceptScore W1883398051C2778576202 @default.
- W1883398051 hasConceptScore W1883398051C2778836790 @default.
- W1883398051 hasConceptScore W1883398051C2779227376 @default.
- W1883398051 hasConceptScore W1883398051C42475967 @default.
- W1883398051 hasConceptScore W1883398051C43617362 @default.
- W1883398051 hasConceptScore W1883398051C49040817 @default.
- W1883398051 hasConceptScore W1883398051C77671233 @default.
- W1883398051 hasConceptScore W1883398051C80107235 @default.
- W1883398051 hasIssue "S1" @default.
- W1883398051 hasLocation W18833980511 @default.
- W1883398051 hasOpenAccess W1883398051 @default.
- W1883398051 hasPrimaryLocation W18833980511 @default.
- W1883398051 hasRelatedWork W1200211407 @default.
- W1883398051 hasRelatedWork W1883398051 @default.
- W1883398051 hasRelatedWork W1978788402 @default.
- W1883398051 hasRelatedWork W2014225583 @default.
- W1883398051 hasRelatedWork W2035529750 @default.
- W1883398051 hasRelatedWork W2038052972 @default.
- W1883398051 hasRelatedWork W2380633932 @default.
- W1883398051 hasRelatedWork W2657382776 @default.
- W1883398051 hasRelatedWork W3183326720 @default.
- W1883398051 hasRelatedWork W4230594308 @default.
- W1883398051 hasVolume "46" @default.
- W1883398051 isParatext "false" @default.
- W1883398051 isRetracted "false" @default.
- W1883398051 magId "1883398051" @default.
- W1883398051 workType "article" @default.