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- W1883722191 abstract "Parallelism and uniformity are the two basic requirements of the modern medium current ion implanters. These two are usually called dosimetry. We have developed, for the first time, an analytical tool for the dosimetry study. Borrowed from a concept in accelerator physics, the transfer matrix has been used for these studies. Because of the large non-linearity in the fields of the devices, the standard method of the transfer matrix has been modified for our purpose. Some simplifications are also necessary. This paper applies this new method to the Eaton NV-8250 ion implanter. The analytical results show that it not only helps us to understand the correlation between dosimetry and hardware, but also provides a scaling law to guide the future performance improvement. We believe that this analytical tool can be applied to other implanters." @default.
- W1883722191 created "2016-06-24" @default.
- W1883722191 creator A5045641750 @default.
- W1883722191 date "2003-01-20" @default.
- W1883722191 modified "2023-09-25" @default.
- W1883722191 title "Using transfer matrix to analyze the dosimetry of ion implanters" @default.
- W1883722191 cites W135149850 @default.
- W1883722191 cites W1503299142 @default.
- W1883722191 cites W2027300688 @default.
- W1883722191 cites W2068003406 @default.
- W1883722191 cites W2092092806 @default.
- W1883722191 cites W31613383 @default.
- W1883722191 doi "https://doi.org/10.1109/iit.1999.812148" @default.
- W1883722191 hasPublicationYear "2003" @default.
- W1883722191 type Work @default.
- W1883722191 sameAs 1883722191 @default.
- W1883722191 citedByCount "0" @default.
- W1883722191 crossrefType "proceedings-article" @default.
- W1883722191 hasAuthorship W1883722191A5045641750 @default.
- W1883722191 hasConcept C106487976 @default.
- W1883722191 hasConcept C120665830 @default.
- W1883722191 hasConcept C121332964 @default.
- W1883722191 hasConcept C122890649 @default.
- W1883722191 hasConcept C127413603 @default.
- W1883722191 hasConcept C145148216 @default.
- W1883722191 hasConcept C156005064 @default.
- W1883722191 hasConcept C159985019 @default.
- W1883722191 hasConcept C192562407 @default.
- W1883722191 hasConcept C19527891 @default.
- W1883722191 hasConcept C24326235 @default.
- W1883722191 hasConcept C2524010 @default.
- W1883722191 hasConcept C2989005 @default.
- W1883722191 hasConcept C31972630 @default.
- W1883722191 hasConcept C33923547 @default.
- W1883722191 hasConcept C41008148 @default.
- W1883722191 hasConcept C41823505 @default.
- W1883722191 hasConcept C62520636 @default.
- W1883722191 hasConcept C71924100 @default.
- W1883722191 hasConcept C75088862 @default.
- W1883722191 hasConcept C77170095 @default.
- W1883722191 hasConcept C99844830 @default.
- W1883722191 hasConceptScore W1883722191C106487976 @default.
- W1883722191 hasConceptScore W1883722191C120665830 @default.
- W1883722191 hasConceptScore W1883722191C121332964 @default.
- W1883722191 hasConceptScore W1883722191C122890649 @default.
- W1883722191 hasConceptScore W1883722191C127413603 @default.
- W1883722191 hasConceptScore W1883722191C145148216 @default.
- W1883722191 hasConceptScore W1883722191C156005064 @default.
- W1883722191 hasConceptScore W1883722191C159985019 @default.
- W1883722191 hasConceptScore W1883722191C192562407 @default.
- W1883722191 hasConceptScore W1883722191C19527891 @default.
- W1883722191 hasConceptScore W1883722191C24326235 @default.
- W1883722191 hasConceptScore W1883722191C2524010 @default.
- W1883722191 hasConceptScore W1883722191C2989005 @default.
- W1883722191 hasConceptScore W1883722191C31972630 @default.
- W1883722191 hasConceptScore W1883722191C33923547 @default.
- W1883722191 hasConceptScore W1883722191C41008148 @default.
- W1883722191 hasConceptScore W1883722191C41823505 @default.
- W1883722191 hasConceptScore W1883722191C62520636 @default.
- W1883722191 hasConceptScore W1883722191C71924100 @default.
- W1883722191 hasConceptScore W1883722191C75088862 @default.
- W1883722191 hasConceptScore W1883722191C77170095 @default.
- W1883722191 hasConceptScore W1883722191C99844830 @default.
- W1883722191 hasLocation W18837221911 @default.
- W1883722191 hasOpenAccess W1883722191 @default.
- W1883722191 hasPrimaryLocation W18837221911 @default.
- W1883722191 hasRelatedWork W1527260697 @default.
- W1883722191 hasRelatedWork W1963488190 @default.
- W1883722191 hasRelatedWork W2034152031 @default.
- W1883722191 hasRelatedWork W2049102449 @default.
- W1883722191 hasRelatedWork W2057613723 @default.
- W1883722191 hasRelatedWork W2086063405 @default.
- W1883722191 hasRelatedWork W2151632525 @default.
- W1883722191 hasRelatedWork W2160766931 @default.
- W1883722191 hasRelatedWork W2187469958 @default.
- W1883722191 isParatext "false" @default.
- W1883722191 isRetracted "false" @default.
- W1883722191 magId "1883722191" @default.
- W1883722191 workType "article" @default.