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- W1887029274 abstract "We have demonstrated that the periodicity in pore structure increases the elastic modulus E with maintaining the dielectric constant k by analytical and numerical calculations. The periodic porous silica films having the hexagonal arrangement of circular cylindrical pores with k 3 GPa is feasible at the porosity of 0.62 with the bulk material of k/sub b/=4.0 and E/sub b/>21 GPa. Calculation results have been confirmed with the experimental data by taking into account the experimental pore shape. The periodic porous silica films having the three-dimensional cubic structure of spherical pores with k 3GPa is feasible at the porosity of 0.60 using the bulk material of k/sub b/=4.0 and E/sub b/>12 GPa." @default.
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- W1887029274 date "2004-03-22" @default.
- W1887029274 modified "2023-09-26" @default.
- W1887029274 title "Theoretical analysis of ultra low-k porous films with periodic pore arrangement and high elastic modulus" @default.
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- W1887029274 doi "https://doi.org/10.1109/iitc.2003.1219712" @default.
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