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• W1887482077 abstract "The paper addresses critical issues associated with 90 and 65 nm copper low k interconnects. A stable baseline with >98% yield on 1E7via and 5m long serpent was established. Electromigration (EM) and IV breakdown performance was improved by optimizing the post CMP Cu pre-treatment and the dielectric barrier obtaining EM T/sub 0.1/ lifetime of greater than 10 yrs at 1.5 MA/cm/sup 2/ and >6MV/cm IV breakdown field. Detailed characterization of the impact of the barrier process on stress migration (SM) is presented. Extendibility of the process flow to sub-90nm interconnects and advanced dielectric (k<2.7) is shown." @default.
• W1887482077 created "2016-06-24" @default.
• W1887482077 creator A5018501536 @default.
• W1887482077 creator A5023406052 @default.
• W1887482077 creator A5025600931 @default.
• W1887482077 creator A5030880380 @default.
• W1887482077 creator A5036063812 @default.
• W1887482077 creator A5047875162 @default.
• W1887482077 creator A5071080153 @default.
• W1887482077 creator A5076237939 @default.
• W1887482077 creator A5082158249 @default.
• W1887482077 creator A5090467265 @default.
• W1887482077 date "2004-10-26" @default.
• W1887482077 modified "2023-09-23" @default.
• W1887482077 title "300mm copper low-k integration and reliability for 90 and 65 nm nodes" @default.
• W1887482077 doi "https://doi.org/10.1109/iitc.2004.1345684" @default.
• W1887482077 hasPublicationYear "2004" @default.
• W1887482077 type Work @default.
• W1887482077 sameAs 1887482077 @default.
• W1887482077 citedByCount "1" @default.
• W1887482077 crossrefType "proceedings-article" @default.
• W1887482077 hasAuthorship W1887482077A5018501536 @default.
• W1887482077 hasAuthorship W1887482077A5023406052 @default.
• W1887482077 hasAuthorship W1887482077A5025600931 @default.
• W1887482077 hasAuthorship W1887482077A5030880380 @default.
• W1887482077 hasAuthorship W1887482077A5036063812 @default.
• W1887482077 hasAuthorship W1887482077A5047875162 @default.
• W1887482077 hasAuthorship W1887482077A5071080153 @default.
• W1887482077 hasAuthorship W1887482077A5076237939 @default.
• W1887482077 hasAuthorship W1887482077A5082158249 @default.
• W1887482077 hasAuthorship W1887482077A5090467265 @default.
• W1887482077 hasConcept C116372231 @default.
• W1887482077 hasConcept C119599485 @default.
• W1887482077 hasConcept C121332964 @default.
• W1887482077 hasConcept C127413603 @default.
• W1887482077 hasConcept C133386390 @default.
• W1887482077 hasConcept C134121241 @default.
• W1887482077 hasConcept C138055206 @default.
• W1887482077 hasConcept C138885662 @default.
• W1887482077 hasConcept C159985019 @default.
• W1887482077 hasConcept C163258240 @default.
• W1887482077 hasConcept C191897082 @default.
• W1887482077 hasConcept C192562407 @default.
• W1887482077 hasConcept C200601418 @default.
• W1887482077 hasConcept C21036866 @default.
• W1887482077 hasConcept C24326235 @default.
• W1887482077 hasConcept C2779866884 @default.
• W1887482077 hasConcept C2984221369 @default.
• W1887482077 hasConcept C41895202 @default.
• W1887482077 hasConcept C43214815 @default.
• W1887482077 hasConcept C49040817 @default.
• W1887482077 hasConcept C544778455 @default.
• W1887482077 hasConcept C70401718 @default.
• W1887482077 hasConcept C97355855 @default.
• W1887482077 hasConceptScore W1887482077C116372231 @default.
• W1887482077 hasConceptScore W1887482077C119599485 @default.
• W1887482077 hasConceptScore W1887482077C121332964 @default.
• W1887482077 hasConceptScore W1887482077C127413603 @default.
• W1887482077 hasConceptScore W1887482077C133386390 @default.
• W1887482077 hasConceptScore W1887482077C134121241 @default.
• W1887482077 hasConceptScore W1887482077C138055206 @default.
• W1887482077 hasConceptScore W1887482077C138885662 @default.
• W1887482077 hasConceptScore W1887482077C159985019 @default.
• W1887482077 hasConceptScore W1887482077C163258240 @default.
• W1887482077 hasConceptScore W1887482077C191897082 @default.
• W1887482077 hasConceptScore W1887482077C192562407 @default.
• W1887482077 hasConceptScore W1887482077C200601418 @default.
• W1887482077 hasConceptScore W1887482077C21036866 @default.
• W1887482077 hasConceptScore W1887482077C24326235 @default.
• W1887482077 hasConceptScore W1887482077C2779866884 @default.
• W1887482077 hasConceptScore W1887482077C2984221369 @default.
• W1887482077 hasConceptScore W1887482077C41895202 @default.
• W1887482077 hasConceptScore W1887482077C43214815 @default.
• W1887482077 hasConceptScore W1887482077C49040817 @default.
• W1887482077 hasConceptScore W1887482077C544778455 @default.
• W1887482077 hasConceptScore W1887482077C70401718 @default.
• W1887482077 hasConceptScore W1887482077C97355855 @default.
• W1887482077 hasLocation W18874820771 @default.
• W1887482077 hasOpenAccess W1887482077 @default.
• W1887482077 hasPrimaryLocation W18874820771 @default.
• W1887482077 hasRelatedWork W1593052588 @default.
• W1887482077 hasRelatedWork W1685134558 @default.
• W1887482077 hasRelatedWork W1777403202 @default.
• W1887482077 hasRelatedWork W1811509911 @default.
• W1887482077 hasRelatedWork W1867656323 @default.
• W1887482077 hasRelatedWork W1868865278 @default.
• W1887482077 hasRelatedWork W1909141330 @default.
• W1887482077 hasRelatedWork W1952220924 @default.
• W1887482077 hasRelatedWork W1979619310 @default.
• W1887482077 hasRelatedWork W1983578345 @default.
• W1887482077 hasRelatedWork W2019328132 @default.
• W1887482077 hasRelatedWork W2036572270 @default.
• W1887482077 hasRelatedWork W2105111602 @default.
• W1887482077 hasRelatedWork W2108284215 @default.
• W1887482077 hasRelatedWork W2110314860 @default.
• W1887482077 hasRelatedWork W2134586150 @default.
• W1887482077 hasRelatedWork W2137655584 @default.
• W1887482077 hasRelatedWork W2151350500 @default.
• W1887482077 hasRelatedWork W2539920539 @default.
• W1887482077 hasRelatedWork W1843940316 @default.

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