Matches in SemOpenAlex for { <https://semopenalex.org/work/W1891034605> ?p ?o ?g. }
Showing items 1 to 73 of
73
with 100 items per page.
- W1891034605 abstract "In this paper, a framework for 'advance control' to prevent various troubles on lot processing in ULSI development and fabrication lines is described. The features of the framework are preventing in advance troubles caused by the deterioration of equipment performance by a computer system and bringing abilities of experts on semiconductor technology into full operation. We have developed a Computer Integrated Manufacturing (CIM) system with advanced control functions to realize this framework. The multimedia information system is one of the new methods which can transfer the abnormal information to experts at any location and any situation, immediately." @default.
- W1891034605 created "2016-06-24" @default.
- W1891034605 creator A5020816467 @default.
- W1891034605 creator A5037205053 @default.
- W1891034605 creator A5046886651 @default.
- W1891034605 creator A5072649370 @default.
- W1891034605 creator A5074040545 @default.
- W1891034605 date "2002-11-23" @default.
- W1891034605 modified "2023-09-24" @default.
- W1891034605 title "A CIM system with advance control functions for next generation semiconductor devices" @default.
- W1891034605 cites W2120168354 @default.
- W1891034605 doi "https://doi.org/10.1109/issm.1997.664626" @default.
- W1891034605 hasPublicationYear "2002" @default.
- W1891034605 type Work @default.
- W1891034605 sameAs 1891034605 @default.
- W1891034605 citedByCount "1" @default.
- W1891034605 crossrefType "proceedings-article" @default.
- W1891034605 hasAuthorship W1891034605A5020816467 @default.
- W1891034605 hasAuthorship W1891034605A5037205053 @default.
- W1891034605 hasAuthorship W1891034605A5046886651 @default.
- W1891034605 hasAuthorship W1891034605A5072649370 @default.
- W1891034605 hasAuthorship W1891034605A5074040545 @default.
- W1891034605 hasConcept C117671659 @default.
- W1891034605 hasConcept C119599485 @default.
- W1891034605 hasConcept C127413603 @default.
- W1891034605 hasConcept C149635348 @default.
- W1891034605 hasConcept C154945302 @default.
- W1891034605 hasConcept C160671074 @default.
- W1891034605 hasConcept C17500928 @default.
- W1891034605 hasConcept C201995342 @default.
- W1891034605 hasConcept C2775924081 @default.
- W1891034605 hasConcept C41008148 @default.
- W1891034605 hasConcept C53688548 @default.
- W1891034605 hasConcept C66018809 @default.
- W1891034605 hasConceptScore W1891034605C117671659 @default.
- W1891034605 hasConceptScore W1891034605C119599485 @default.
- W1891034605 hasConceptScore W1891034605C127413603 @default.
- W1891034605 hasConceptScore W1891034605C149635348 @default.
- W1891034605 hasConceptScore W1891034605C154945302 @default.
- W1891034605 hasConceptScore W1891034605C160671074 @default.
- W1891034605 hasConceptScore W1891034605C17500928 @default.
- W1891034605 hasConceptScore W1891034605C201995342 @default.
- W1891034605 hasConceptScore W1891034605C2775924081 @default.
- W1891034605 hasConceptScore W1891034605C41008148 @default.
- W1891034605 hasConceptScore W1891034605C53688548 @default.
- W1891034605 hasConceptScore W1891034605C66018809 @default.
- W1891034605 hasLocation W18910346051 @default.
- W1891034605 hasOpenAccess W1891034605 @default.
- W1891034605 hasPrimaryLocation W18910346051 @default.
- W1891034605 hasRelatedWork W1514066982 @default.
- W1891034605 hasRelatedWork W1514896573 @default.
- W1891034605 hasRelatedWork W1517899174 @default.
- W1891034605 hasRelatedWork W1865911307 @default.
- W1891034605 hasRelatedWork W1898362712 @default.
- W1891034605 hasRelatedWork W1993856537 @default.
- W1891034605 hasRelatedWork W2027052579 @default.
- W1891034605 hasRelatedWork W2058500513 @default.
- W1891034605 hasRelatedWork W2074374991 @default.
- W1891034605 hasRelatedWork W2075154483 @default.
- W1891034605 hasRelatedWork W2083360527 @default.
- W1891034605 hasRelatedWork W2135186161 @default.
- W1891034605 hasRelatedWork W2146357899 @default.
- W1891034605 hasRelatedWork W2151300747 @default.
- W1891034605 hasRelatedWork W2168572512 @default.
- W1891034605 hasRelatedWork W2170012787 @default.
- W1891034605 hasRelatedWork W2288493513 @default.
- W1891034605 hasRelatedWork W2543320733 @default.
- W1891034605 hasRelatedWork W127950850 @default.
- W1891034605 hasRelatedWork W2098015922 @default.
- W1891034605 isParatext "false" @default.
- W1891034605 isRetracted "false" @default.
- W1891034605 magId "1891034605" @default.
- W1891034605 workType "article" @default.