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- W189163615 abstract "Polycrystalline silicon (poly-Si) can be deposited during molecular beam epitaxy (MBE) simultaneously with monocrystalline silicon (mono-Si). Polysilicon is formed, when an amorphous layer is used as a substrate, whereas mono-Si grows only on monocrystalline silicon. The polysilicon, deposited under MBE conditions, is investigated with respect to grain size, resistivity, and doping profiles. With different MBE specific doping procedures the doping level can be varied from 1015cm-3 to 1019cm-3. The drop from high resistivity (~ 105 Ωcm) to low resistivity (<10–2Ωcm) for MBE-polysilicon (n-type and p-type) is found for doping concentrations in the range of 1018cm-3 to 1019cm-3 similar to CVD-polysilicon. SIMS profiles of Sb in the polysilicon layer differ from those in MBE layers indicating different doping mechanisms." @default.
- W189163615 created "2016-06-24" @default.
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- W189163615 date "1989-01-01" @default.
- W189163615 modified "2023-09-25" @default.
- W189163615 title "Characterization of MBE-Grown Polysilicon" @default.
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- W189163615 doi "https://doi.org/10.1007/978-3-642-93413-1_27" @default.
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