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- W1893485409 abstract "This paper presents a surface-plasmons-based tunable color filter using aluminum (Al) subwavelength grating operated by an electrostatic comb-drive actuator. We also fabricate the actuator integrated with an Al hinge and a stretchable parylene-C hinge that are used to constantly change the period of the Al subwavelength grating. Freestanding Al subwavelength grating with 450 nm pitch performed extraordinary optical transmission at 450 nm wavelength by TM-polarized light. We obtained a 225 nm displacement of the actuator having the stretchable hinges by applied voltage of 45 V, and a 750 nm displacement of the actuator having the Al hinges by applied voltage of 12 V." @default.
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- W1893485409 date "2015-06-01" @default.
- W1893485409 modified "2023-09-27" @default.
- W1893485409 title "Fabrication of tunable plasmonic color filter using al subwavelength grating integrated with electrostatic comb-drive actuator" @default.
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- W1893485409 doi "https://doi.org/10.1109/transducers.2015.7181360" @default.
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