Matches in SemOpenAlex for { <https://semopenalex.org/work/W1894647777> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W1894647777 abstract "This paper reports a new method to fabricate in-plane oriented micro structures with use of an-isotropic wet chemical etching techniques. The method is very engaging due to the simplicity, low demands on cleanroom resources, the high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. The functionality is demonstrated by performed analytical and numerical simulations as well as measurements of a duckbill valve." @default.
- W1894647777 created "2016-06-24" @default.
- W1894647777 creator A5012791912 @default.
- W1894647777 creator A5048744004 @default.
- W1894647777 creator A5059502127 @default.
- W1894647777 creator A5077525070 @default.
- W1894647777 creator A5079929913 @default.
- W1894647777 creator A5081179528 @default.
- W1894647777 date "1998-01-01" @default.
- W1894647777 modified "2023-09-28" @default.
- W1894647777 title "A New Fabrication Method for In-Plane Micro Fluid Handling Components And Analysis Systems" @default.
- W1894647777 cites W2019014472 @default.
- W1894647777 cites W2019023417 @default.
- W1894647777 cites W2035261140 @default.
- W1894647777 cites W2151192676 @default.
- W1894647777 doi "https://doi.org/10.1007/978-94-011-5010-1_13" @default.
- W1894647777 hasPublicationYear "1998" @default.
- W1894647777 type Work @default.
- W1894647777 sameAs 1894647777 @default.
- W1894647777 citedByCount "2" @default.
- W1894647777 crossrefType "book-chapter" @default.
- W1894647777 hasAuthorship W1894647777A5012791912 @default.
- W1894647777 hasAuthorship W1894647777A5048744004 @default.
- W1894647777 hasAuthorship W1894647777A5059502127 @default.
- W1894647777 hasAuthorship W1894647777A5077525070 @default.
- W1894647777 hasAuthorship W1894647777A5079929913 @default.
- W1894647777 hasAuthorship W1894647777A5081179528 @default.
- W1894647777 hasConcept C100460472 @default.
- W1894647777 hasConcept C127094628 @default.
- W1894647777 hasConcept C127413603 @default.
- W1894647777 hasConcept C136525101 @default.
- W1894647777 hasConcept C142724271 @default.
- W1894647777 hasConcept C160671074 @default.
- W1894647777 hasConcept C171250308 @default.
- W1894647777 hasConcept C17825722 @default.
- W1894647777 hasConcept C192562407 @default.
- W1894647777 hasConcept C199639397 @default.
- W1894647777 hasConcept C204787440 @default.
- W1894647777 hasConcept C21880701 @default.
- W1894647777 hasConcept C2524010 @default.
- W1894647777 hasConcept C2779227376 @default.
- W1894647777 hasConcept C28826006 @default.
- W1894647777 hasConcept C33923547 @default.
- W1894647777 hasConcept C41008148 @default.
- W1894647777 hasConcept C48209547 @default.
- W1894647777 hasConcept C71924100 @default.
- W1894647777 hasConcept C78519656 @default.
- W1894647777 hasConceptScore W1894647777C100460472 @default.
- W1894647777 hasConceptScore W1894647777C127094628 @default.
- W1894647777 hasConceptScore W1894647777C127413603 @default.
- W1894647777 hasConceptScore W1894647777C136525101 @default.
- W1894647777 hasConceptScore W1894647777C142724271 @default.
- W1894647777 hasConceptScore W1894647777C160671074 @default.
- W1894647777 hasConceptScore W1894647777C171250308 @default.
- W1894647777 hasConceptScore W1894647777C17825722 @default.
- W1894647777 hasConceptScore W1894647777C192562407 @default.
- W1894647777 hasConceptScore W1894647777C199639397 @default.
- W1894647777 hasConceptScore W1894647777C204787440 @default.
- W1894647777 hasConceptScore W1894647777C21880701 @default.
- W1894647777 hasConceptScore W1894647777C2524010 @default.
- W1894647777 hasConceptScore W1894647777C2779227376 @default.
- W1894647777 hasConceptScore W1894647777C28826006 @default.
- W1894647777 hasConceptScore W1894647777C33923547 @default.
- W1894647777 hasConceptScore W1894647777C41008148 @default.
- W1894647777 hasConceptScore W1894647777C48209547 @default.
- W1894647777 hasConceptScore W1894647777C71924100 @default.
- W1894647777 hasConceptScore W1894647777C78519656 @default.
- W1894647777 hasLocation W18946477771 @default.
- W1894647777 hasOpenAccess W1894647777 @default.
- W1894647777 hasPrimaryLocation W18946477771 @default.
- W1894647777 hasRelatedWork W163042229 @default.
- W1894647777 hasRelatedWork W1967441143 @default.
- W1894647777 hasRelatedWork W1999114922 @default.
- W1894647777 hasRelatedWork W2042092791 @default.
- W1894647777 hasRelatedWork W2055875838 @default.
- W1894647777 hasRelatedWork W2058398164 @default.
- W1894647777 hasRelatedWork W2106268621 @default.
- W1894647777 hasRelatedWork W2136230572 @default.
- W1894647777 hasRelatedWork W2203135752 @default.
- W1894647777 hasRelatedWork W2295231668 @default.
- W1894647777 hasRelatedWork W23838901 @default.
- W1894647777 hasRelatedWork W2464756067 @default.
- W1894647777 hasRelatedWork W2596333925 @default.
- W1894647777 hasRelatedWork W2614266694 @default.
- W1894647777 hasRelatedWork W2783721970 @default.
- W1894647777 hasRelatedWork W2951491353 @default.
- W1894647777 hasRelatedWork W2982891263 @default.
- W1894647777 hasRelatedWork W340723921 @default.
- W1894647777 hasRelatedWork W838840115 @default.
- W1894647777 hasRelatedWork W1554512119 @default.
- W1894647777 isParatext "false" @default.
- W1894647777 isRetracted "false" @default.
- W1894647777 magId "1894647777" @default.
- W1894647777 workType "book-chapter" @default.