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- W1895421207 abstract "A dual hard mask, dual damascene architecture was developed to circumvent integration problems brought by porous ULK dielectric use. It was demonstrated that a via first strategy with adequately defined hard masks can improve patterning conditions." @default.
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- W1895421207 date "2004-03-22" @default.
- W1895421207 modified "2023-09-26" @default.
- W1895421207 title "Porous dielectric dual damascene patterning issues for 65 nm node: can architecture bring a solution?" @default.
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- W1895421207 doi "https://doi.org/10.1109/iitc.2003.1219723" @default.
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