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- W1897479987 abstract "We propose a mechanism and a prediction model for SiOCH etching. The surface reaction depends on both incident fluxes from plasma and material properties (film composition and density). The sensitivity of etch rate to the change in incident CF/sub x/ fluxes induces a narrow process window for the etching of SiOCH and porous SiOCH materials. Further cooperation between etching and other process engineers needs to be promoted to create a more reliable process module." @default.
- W1897479987 created "2016-06-24" @default.
- W1897479987 creator A5023413228 @default.
- W1897479987 creator A5029744173 @default.
- W1897479987 creator A5033576785 @default.
- W1897479987 creator A5085747078 @default.
- W1897479987 date "2004-03-23" @default.
- W1897479987 modified "2023-09-28" @default.
- W1897479987 title "SiOCH low-k etching: quantitative prediction of surface reaction" @default.
- W1897479987 cites W1562617726 @default.
- W1897479987 cites W1991675002 @default.
- W1897479987 cites W2056889600 @default.
- W1897479987 cites W2093000238 @default.
- W1897479987 doi "https://doi.org/10.1109/iitc.2003.1219764" @default.
- W1897479987 hasPublicationYear "2004" @default.
- W1897479987 type Work @default.
- W1897479987 sameAs 1897479987 @default.
- W1897479987 citedByCount "0" @default.
- W1897479987 crossrefType "proceedings-article" @default.
- W1897479987 hasAuthorship W1897479987A5023413228 @default.
- W1897479987 hasAuthorship W1897479987A5029744173 @default.
- W1897479987 hasAuthorship W1897479987A5033576785 @default.
- W1897479987 hasAuthorship W1897479987A5085747078 @default.
- W1897479987 hasConcept C100460472 @default.
- W1897479987 hasConcept C107187091 @default.
- W1897479987 hasConcept C111919701 @default.
- W1897479987 hasConcept C113196181 @default.
- W1897479987 hasConcept C127413603 @default.
- W1897479987 hasConcept C130472188 @default.
- W1897479987 hasConcept C159985019 @default.
- W1897479987 hasConcept C185592680 @default.
- W1897479987 hasConcept C192562407 @default.
- W1897479987 hasConcept C204223013 @default.
- W1897479987 hasConcept C21200559 @default.
- W1897479987 hasConcept C24326235 @default.
- W1897479987 hasConcept C2524010 @default.
- W1897479987 hasConcept C2776799497 @default.
- W1897479987 hasConcept C2777441419 @default.
- W1897479987 hasConcept C2779227376 @default.
- W1897479987 hasConcept C33923547 @default.
- W1897479987 hasConcept C41008148 @default.
- W1897479987 hasConcept C43617362 @default.
- W1897479987 hasConcept C49040817 @default.
- W1897479987 hasConcept C6648577 @default.
- W1897479987 hasConcept C98045186 @default.
- W1897479987 hasConceptScore W1897479987C100460472 @default.
- W1897479987 hasConceptScore W1897479987C107187091 @default.
- W1897479987 hasConceptScore W1897479987C111919701 @default.
- W1897479987 hasConceptScore W1897479987C113196181 @default.
- W1897479987 hasConceptScore W1897479987C127413603 @default.
- W1897479987 hasConceptScore W1897479987C130472188 @default.
- W1897479987 hasConceptScore W1897479987C159985019 @default.
- W1897479987 hasConceptScore W1897479987C185592680 @default.
- W1897479987 hasConceptScore W1897479987C192562407 @default.
- W1897479987 hasConceptScore W1897479987C204223013 @default.
- W1897479987 hasConceptScore W1897479987C21200559 @default.
- W1897479987 hasConceptScore W1897479987C24326235 @default.
- W1897479987 hasConceptScore W1897479987C2524010 @default.
- W1897479987 hasConceptScore W1897479987C2776799497 @default.
- W1897479987 hasConceptScore W1897479987C2777441419 @default.
- W1897479987 hasConceptScore W1897479987C2779227376 @default.
- W1897479987 hasConceptScore W1897479987C33923547 @default.
- W1897479987 hasConceptScore W1897479987C41008148 @default.
- W1897479987 hasConceptScore W1897479987C43617362 @default.
- W1897479987 hasConceptScore W1897479987C49040817 @default.
- W1897479987 hasConceptScore W1897479987C6648577 @default.
- W1897479987 hasConceptScore W1897479987C98045186 @default.
- W1897479987 hasLocation W18974799871 @default.
- W1897479987 hasOpenAccess W1897479987 @default.
- W1897479987 hasPrimaryLocation W18974799871 @default.
- W1897479987 hasRelatedWork W1989752065 @default.
- W1897479987 hasRelatedWork W1993498038 @default.
- W1897479987 hasRelatedWork W1999152561 @default.
- W1897479987 hasRelatedWork W2012488792 @default.
- W1897479987 hasRelatedWork W2017651110 @default.
- W1897479987 hasRelatedWork W2024024476 @default.
- W1897479987 hasRelatedWork W2076869582 @default.
- W1897479987 hasRelatedWork W2086894037 @default.
- W1897479987 hasRelatedWork W2095506803 @default.
- W1897479987 hasRelatedWork W2130484382 @default.
- W1897479987 hasRelatedWork W2154899824 @default.
- W1897479987 hasRelatedWork W2352412304 @default.
- W1897479987 hasRelatedWork W2381543807 @default.
- W1897479987 hasRelatedWork W2989961076 @default.
- W1897479987 hasRelatedWork W306539406 @default.
- W1897479987 hasRelatedWork W3133391268 @default.
- W1897479987 hasRelatedWork W3159475103 @default.
- W1897479987 hasRelatedWork W3183820262 @default.
- W1897479987 hasRelatedWork W345805109 @default.
- W1897479987 hasRelatedWork W611963390 @default.
- W1897479987 isParatext "false" @default.
- W1897479987 isRetracted "false" @default.
- W1897479987 magId "1897479987" @default.
- W1897479987 workType "article" @default.