Matches in SemOpenAlex for { <https://semopenalex.org/work/W1899064290> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W1899064290 abstract "The growth of highly carbon doped lattice matched InGaAs grown on semi-insulating InP is investigated in an AIX 2600G3 Multiwafer Planetary Reactor/spl reg/. A systematical investigation of the dependency of growth temperature, V/III ratio and doping concentration was conducted using CBr/sub 4/ as C precursor and AsH/sub 3/ as group V source. Subsequent to the growth an in-situ anneal step with TMAs was applied to activate carriers in the InGaAs layer. The highest achieved p-type carrier concentration is 6/spl times/10/sup 19/ cm/sup -3/ grown at 440/spl deg/C with a V/III ratio of 1.5. The layers were investigated by XRD, sheet resistance- and Hall-effect measurements." @default.
- W1899064290 created "2016-06-24" @default.
- W1899064290 creator A5004356743 @default.
- W1899064290 creator A5014560642 @default.
- W1899064290 creator A5022414227 @default.
- W1899064290 creator A5028403193 @default.
- W1899064290 creator A5034121703 @default.
- W1899064290 creator A5073466181 @default.
- W1899064290 creator A5073546646 @default.
- W1899064290 date "2003-11-21" @default.
- W1899064290 modified "2023-09-25" @default.
- W1899064290 title "Highly carbon doped InGaAs grown in an AIX 2600G3 Multiwafer Planetary Reactor/spl reg/" @default.
- W1899064290 cites W1983671564 @default.
- W1899064290 cites W1996764531 @default.
- W1899064290 doi "https://doi.org/10.1109/iciprm.2003.1205405" @default.
- W1899064290 hasPublicationYear "2003" @default.
- W1899064290 type Work @default.
- W1899064290 sameAs 1899064290 @default.
- W1899064290 citedByCount "0" @default.
- W1899064290 crossrefType "proceedings-article" @default.
- W1899064290 hasAuthorship W1899064290A5004356743 @default.
- W1899064290 hasAuthorship W1899064290A5014560642 @default.
- W1899064290 hasAuthorship W1899064290A5022414227 @default.
- W1899064290 hasAuthorship W1899064290A5028403193 @default.
- W1899064290 hasAuthorship W1899064290A5034121703 @default.
- W1899064290 hasAuthorship W1899064290A5073466181 @default.
- W1899064290 hasAuthorship W1899064290A5073546646 @default.
- W1899064290 hasConcept C104779481 @default.
- W1899064290 hasConcept C113196181 @default.
- W1899064290 hasConcept C13965031 @default.
- W1899064290 hasConcept C140205800 @default.
- W1899064290 hasConcept C159985019 @default.
- W1899064290 hasConcept C171250308 @default.
- W1899064290 hasConcept C185592680 @default.
- W1899064290 hasConcept C192562407 @default.
- W1899064290 hasConcept C2777855556 @default.
- W1899064290 hasConcept C2779227376 @default.
- W1899064290 hasConcept C43617362 @default.
- W1899064290 hasConcept C49040817 @default.
- W1899064290 hasConcept C510052550 @default.
- W1899064290 hasConcept C57863236 @default.
- W1899064290 hasConcept C66825105 @default.
- W1899064290 hasConceptScore W1899064290C104779481 @default.
- W1899064290 hasConceptScore W1899064290C113196181 @default.
- W1899064290 hasConceptScore W1899064290C13965031 @default.
- W1899064290 hasConceptScore W1899064290C140205800 @default.
- W1899064290 hasConceptScore W1899064290C159985019 @default.
- W1899064290 hasConceptScore W1899064290C171250308 @default.
- W1899064290 hasConceptScore W1899064290C185592680 @default.
- W1899064290 hasConceptScore W1899064290C192562407 @default.
- W1899064290 hasConceptScore W1899064290C2777855556 @default.
- W1899064290 hasConceptScore W1899064290C2779227376 @default.
- W1899064290 hasConceptScore W1899064290C43617362 @default.
- W1899064290 hasConceptScore W1899064290C49040817 @default.
- W1899064290 hasConceptScore W1899064290C510052550 @default.
- W1899064290 hasConceptScore W1899064290C57863236 @default.
- W1899064290 hasConceptScore W1899064290C66825105 @default.
- W1899064290 hasLocation W18990642901 @default.
- W1899064290 hasOpenAccess W1899064290 @default.
- W1899064290 hasPrimaryLocation W18990642901 @default.
- W1899064290 hasRelatedWork W1483438169 @default.
- W1899064290 hasRelatedWork W1496147882 @default.
- W1899064290 hasRelatedWork W1537557875 @default.
- W1899064290 hasRelatedWork W1553502998 @default.
- W1899064290 hasRelatedWork W1575900516 @default.
- W1899064290 hasRelatedWork W1581868967 @default.
- W1899064290 hasRelatedWork W1631610061 @default.
- W1899064290 hasRelatedWork W1891186353 @default.
- W1899064290 hasRelatedWork W1912845243 @default.
- W1899064290 hasRelatedWork W1930806389 @default.
- W1899064290 hasRelatedWork W2022030960 @default.
- W1899064290 hasRelatedWork W2095661714 @default.
- W1899064290 hasRelatedWork W2096942834 @default.
- W1899064290 hasRelatedWork W2106486467 @default.
- W1899064290 hasRelatedWork W2123566357 @default.
- W1899064290 hasRelatedWork W2136003307 @default.
- W1899064290 hasRelatedWork W2141773552 @default.
- W1899064290 hasRelatedWork W2159189085 @default.
- W1899064290 hasRelatedWork W2163268778 @default.
- W1899064290 hasRelatedWork W2538668925 @default.
- W1899064290 isParatext "false" @default.
- W1899064290 isRetracted "false" @default.
- W1899064290 magId "1899064290" @default.
- W1899064290 workType "article" @default.