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- W189949876 abstract "High quality nanocrystalline diamond film deposited rapidly by an XeCl excimer laser operated at high laser power (500 W) and repetition rate (300～500 Hz) is presented. A high deposition rate, 250 nm/thousand pulses, was obtained. The effects of laser energy fluence and repetition rate on the deposit ion of diamond film were investigated." @default.
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- W189949876 date "2000-01-01" @default.
- W189949876 modified "2023-09-26" @default.
- W189949876 title "Study of Nanocrystalline Diamond Film Deposited Rapidly by 500 W Excimer Laser" @default.
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