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- W1899695464 abstract "We present and apply a quality factor control method for laterally driven micromechanical resonant microstructures. The present method modifies the thickness of air-damping gap by applying an electrostatic force between the planar resonant microstructure and ground plane; thereby adjusting the quality factor of the microresonators after fabrication. Polysilicon resonators have been designed and fabricated by a 4-mask surface-micromachining process. The present method reduces the quality factor of the fabricated resonator at the rate of 120/V by applying the electrostatic voltage in the range of 1.75/spl sim/2.25 V. The maximum 50% reduction of the quality factor has been achieved at the electrostatic voltage of 2.25 V." @default.
- W1899695464 created "2016-06-24" @default.
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- W1899695464 date "2002-12-24" @default.
- W1899695464 modified "2023-09-28" @default.
- W1899695464 title "An electrostatic quality factor control for surface-micromachined lateral resonators" @default.
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- W1899695464 doi "https://doi.org/10.1109/mhs.1996.563415" @default.
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