FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1900761108> ?p ?o ?g. }

• W1900761108 endingPage "184" @default.
• W1900761108 startingPage "174" @default.
• W1900761108 abstract "Ti1−xSixN (0 ≤ x ≤ 0.26) thin films are grown in mixed Ar/N2 discharges using hybrid high-power pulsed and dc magnetron co-sputtering (HIPIMS/DCMS). In the first set of experiments, the Si target is powered in HIPIMS mode and the Ti target in DCMS; the positions of the targets are then switched for the second set. In both cases, the Si concentration in co-sputtered films, deposited at Ts = 500 °C, is controlled by adjusting the average DCMS target power. A pulsed substrate bias of − 60 V is applied in synchronous with the HIPIMS pulse. Depending on the type of pulsed metal-ion irradiation incident at the growing film, Ti+/Ti2+ vs. Si+/Si2+, completely different nanostructures are obtained. Ti+/Ti2+ irradiation during Ti-HIPIMS/Si-DCMS deposition leads to a phase-segregated nanocolumnar structure with TiN-rich grains encapsulated in a SiNz tissue phase, while Si+/Si2+ ion irradiation in the Si-HIPIMS/Ti-DCMS mode results in the formation of Ti1−xSixN solid solutions with x ≤ 0.24. Film properties, including hardness, modulus of elasticity, and residual stress exhibit a dramatic dependence on the choice of target powered by HIPIMS. Ti-HIPIMS/Si-DCMS TiSiN nanocomposite films are superhard over a composition range of 0.04 ≤ x ≤ 0.26, which is significantly wider than previously reported. The hardness H of films with 0.13 ≤ x ≤ 0.26 is ~ 42 GPa; however, the compressive stress is also high, ranging from − 6.7 to − 8.5 GPa. Si-HIPIMS/Ti-DCMS films are softer at H ~ 14 GPa with 0.03 ≤ x ≤ 0.24, and essentially stress-free (σ ~ 0.5 GPa). Mass spectroscopy analyses at the substrate position reveal that the doubly-to-singly ionized metal-ion flux ratio during HIPIMS pulses is 0.05 for Si and 0.29 for Ti due to the difference between the second ionization potentials of Si and Ti vs. the first ionization potential of the sputtering gas. The average momentum transfer to the film growth surface per deposited atom per pulse 〈pd〉 is ~ 20 × higher during Ti-HIPIMS/Si-DCMS, which results in significantly higher adatom mean-free paths (mfps) leading, in turn, to a phase-segregated nanocolumnar structure. In contrast, relatively low 〈pd〉 values during Si-HIPIMS/Ti-DCMS provide near-surface mixing with lower adatom mfps to form Ti1−xSixN solid solutions over a very wide composition range with x up to 0.24. Relaxed lattice constants decrease linearly, in agreement with ab-initio calculations for random Ti1−xSixN alloys, with increasing x." @default.
• W1900761108 created "2016-06-24" @default.
• W1900761108 creator A5008411200 @default.
• W1900761108 creator A5009828258 @default.
• W1900761108 creator A5010177657 @default.
• W1900761108 creator A5013314984 @default.
• W1900761108 creator A5020723421 @default.
• W1900761108 creator A5048978284 @default.
• W1900761108 creator A5064691939 @default.
• W1900761108 creator A5072294019 @default.
• W1900761108 creator A5073585823 @default.
• W1900761108 date "2015-10-01" @default.
• W1900761108 modified "2023-10-15" @default.
• W1900761108 title "Control of Ti1−xSixN nanostructure via tunable metal-ion momentum transfer during HIPIMS/DCMS co-deposition" @default.
• W1900761108 cites W1755338472 @default.
• W1900761108 cites W1963523562 @default.
• W1900761108 cites W1966417765 @default.
• W1900761108 cites W1968426044 @default.
• W1900761108 cites W1970127494 @default.
• W1900761108 cites W1975824225 @default.
• W1900761108 cites W1979544533 @default.
• W1900761108 cites W1980370048 @default.
• W1900761108 cites W1981368803 @default.
• W1900761108 cites W1981966175 @default.
• W1900761108 cites W1982136762 @default.
• W1900761108 cites W1982462467 @default.
• W1900761108 cites W1989584263 @default.
• W1900761108 cites W1990645051 @default.
• W1900761108 cites W1991138366 @default.
• W1900761108 cites W1994077539 @default.
• W1900761108 cites W1996107967 @default.
• W1900761108 cites W1998070237 @default.
• W1900761108 cites W1998302255 @default.
• W1900761108 cites W1998735077 @default.
• W1900761108 cites W2007848992 @default.
• W1900761108 cites W2023715252 @default.
• W1900761108 cites W2023777678 @default.
• W1900761108 cites W2025801567 @default.
• W1900761108 cites W2026008498 @default.
• W1900761108 cites W2028141197 @default.
• W1900761108 cites W2032016201 @default.
• W1900761108 cites W2033941413 @default.
• W1900761108 cites W2035036525 @default.
• W1900761108 cites W2037521233 @default.
• W1900761108 cites W2040472709 @default.
• W1900761108 cites W2042284106 @default.
• W1900761108 cites W2044562429 @default.
• W1900761108 cites W2048177310 @default.
• W1900761108 cites W2050531448 @default.
• W1900761108 cites W2056975887 @default.
• W1900761108 cites W2068520198 @default.
• W1900761108 cites W2071033262 @default.
• W1900761108 cites W2071679816 @default.
• W1900761108 cites W2073490186 @default.
• W1900761108 cites W2079005708 @default.
• W1900761108 cites W2079360748 @default.
• W1900761108 cites W2080745628 @default.
• W1900761108 cites W2083590781 @default.
• W1900761108 cites W2085945284 @default.
• W1900761108 cites W2086933933 @default.
• W1900761108 cites W2087555951 @default.
• W1900761108 cites W2088765806 @default.
• W1900761108 cites W2089430838 @default.
• W1900761108 cites W2114873572 @default.
• W1900761108 cites W2119786251 @default.
• W1900761108 cites W2146032121 @default.
• W1900761108 cites W2153703866 @default.
• W1900761108 cites W2157216591 @default.
• W1900761108 cites W2167386044 @default.
• W1900761108 cites W2169080346 @default.
• W1900761108 cites W2253049957 @default.
• W1900761108 cites W2319394806 @default.
• W1900761108 cites W2320994716 @default.
• W1900761108 cites W66489875 @default.
• W1900761108 doi "https://doi.org/10.1016/j.surfcoat.2015.09.001" @default.
• W1900761108 hasPublicationYear "2015" @default.
• W1900761108 type Work @default.
• W1900761108 sameAs 1900761108 @default.
• W1900761108 citedByCount "50" @default.
• W1900761108 countsByYear W19007611082017 @default.
• W1900761108 countsByYear W19007611082018 @default.
• W1900761108 countsByYear W19007611082019 @default.
• W1900761108 countsByYear W19007611082020 @default.
• W1900761108 countsByYear W19007611082021 @default.
• W1900761108 countsByYear W19007611082022 @default.
• W1900761108 countsByYear W19007611082023 @default.
• W1900761108 crossrefType "journal-article" @default.
• W1900761108 hasAuthorship W1900761108A5008411200 @default.
• W1900761108 hasAuthorship W1900761108A5009828258 @default.
• W1900761108 hasAuthorship W1900761108A5010177657 @default.
• W1900761108 hasAuthorship W1900761108A5013314984 @default.
• W1900761108 hasAuthorship W1900761108A5020723421 @default.
• W1900761108 hasAuthorship W1900761108A5048978284 @default.
• W1900761108 hasAuthorship W1900761108A5064691939 @default.
• W1900761108 hasAuthorship W1900761108A5072294019 @default.
• W1900761108 hasAuthorship W1900761108A5073585823 @default.
• W1900761108 hasBestOaLocation W19007611082 @default.
• W1900761108 hasConcept C113196181 @default.

• next