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- W1901140133 abstract "The low-frequency (10 KHz) dissipation factor of metal comb/serpentine structures sandwiched between a phosphosilicate glass (PSG) substrate and passivation is a useful electrical indication of moisture penetration through the passivation. Wafer-level dissipation factor readouts after periods of highly accelerated temperature/humidity stress technique (HAST) testing at 159 degrees C and 85% relative humidity were used to monitor the rate of moisture ingression through passivations of various compositions and thicknesses. For plasma-deposited oxynitride films the dominant mechanism is uniform penetration (intrinsic) with a median-time-to-failure of 370 hours (at 159/85). For oxynitride films capped by nitride films, the dominant mechanism is penetration through defects in the nitride film. The defect density of nitride cap films increases with decreasing nitride film thickness. >" @default.
- W1901140133 created "2016-06-24" @default.
- W1901140133 creator A5042842179 @default.
- W1901140133 creator A5078458258 @default.
- W1901140133 date "2002-12-04" @default.
- W1901140133 modified "2023-09-26" @default.
- W1901140133 title "Electrical measurements of moisture penetration through passivation" @default.
- W1901140133 cites W1981328410 @default.
- W1901140133 cites W1986361599 @default.
- W1901140133 cites W1996495078 @default.
- W1901140133 cites W2067764764 @default.
- W1901140133 cites W2132564111 @default.
- W1901140133 cites W2139758463 @default.
- W1901140133 cites W2054508975 @default.
- W1901140133 doi "https://doi.org/10.1109/relphy.1990.66065" @default.
- W1901140133 hasPublicationYear "2002" @default.
- W1901140133 type Work @default.
- W1901140133 sameAs 1901140133 @default.
- W1901140133 citedByCount "1" @default.
- W1901140133 crossrefType "proceedings-article" @default.
- W1901140133 hasAuthorship W1901140133A5042842179 @default.
- W1901140133 hasAuthorship W1901140133A5078458258 @default.
- W1901140133 hasConcept C121332964 @default.
- W1901140133 hasConcept C127413603 @default.
- W1901140133 hasConcept C151420433 @default.
- W1901140133 hasConcept C158960510 @default.
- W1901140133 hasConcept C159985019 @default.
- W1901140133 hasConcept C160671074 @default.
- W1901140133 hasConcept C176864760 @default.
- W1901140133 hasConcept C192562407 @default.
- W1901140133 hasConcept C194760766 @default.
- W1901140133 hasConcept C2777431650 @default.
- W1901140133 hasConcept C2779227376 @default.
- W1901140133 hasConcept C33574316 @default.
- W1901140133 hasConcept C42475967 @default.
- W1901140133 hasConcept C49040817 @default.
- W1901140133 hasConcept C80107235 @default.
- W1901140133 hasConcept C97355855 @default.
- W1901140133 hasConceptScore W1901140133C121332964 @default.
- W1901140133 hasConceptScore W1901140133C127413603 @default.
- W1901140133 hasConceptScore W1901140133C151420433 @default.
- W1901140133 hasConceptScore W1901140133C158960510 @default.
- W1901140133 hasConceptScore W1901140133C159985019 @default.
- W1901140133 hasConceptScore W1901140133C160671074 @default.
- W1901140133 hasConceptScore W1901140133C176864760 @default.
- W1901140133 hasConceptScore W1901140133C192562407 @default.
- W1901140133 hasConceptScore W1901140133C194760766 @default.
- W1901140133 hasConceptScore W1901140133C2777431650 @default.
- W1901140133 hasConceptScore W1901140133C2779227376 @default.
- W1901140133 hasConceptScore W1901140133C33574316 @default.
- W1901140133 hasConceptScore W1901140133C42475967 @default.
- W1901140133 hasConceptScore W1901140133C49040817 @default.
- W1901140133 hasConceptScore W1901140133C80107235 @default.
- W1901140133 hasConceptScore W1901140133C97355855 @default.
- W1901140133 hasLocation W19011401331 @default.
- W1901140133 hasOpenAccess W1901140133 @default.
- W1901140133 hasPrimaryLocation W19011401331 @default.
- W1901140133 hasRelatedWork W1549241290 @default.
- W1901140133 hasRelatedWork W1972627859 @default.
- W1901140133 hasRelatedWork W1984886441 @default.
- W1901140133 hasRelatedWork W1991579395 @default.
- W1901140133 hasRelatedWork W1993843261 @default.
- W1901140133 hasRelatedWork W2000351729 @default.
- W1901140133 hasRelatedWork W2026528454 @default.
- W1901140133 hasRelatedWork W2042371538 @default.
- W1901140133 hasRelatedWork W2048049771 @default.
- W1901140133 hasRelatedWork W2076344426 @default.
- W1901140133 hasRelatedWork W2131546806 @default.
- W1901140133 hasRelatedWork W2135156943 @default.
- W1901140133 hasRelatedWork W2144590815 @default.
- W1901140133 hasRelatedWork W2152146467 @default.
- W1901140133 hasRelatedWork W2156823278 @default.
- W1901140133 hasRelatedWork W2261942186 @default.
- W1901140133 hasRelatedWork W2354125459 @default.
- W1901140133 hasRelatedWork W3118967930 @default.
- W1901140133 hasRelatedWork W3200014575 @default.
- W1901140133 hasRelatedWork W829960367 @default.
- W1901140133 isParatext "false" @default.
- W1901140133 isRetracted "false" @default.
- W1901140133 magId "1901140133" @default.
- W1901140133 workType "article" @default.