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- W1901357711 abstract "For the assessment of a microphotonic pressure sensor device we developed two experimental set-up to have a realistic evaluation of the sensor characteristics. First we used a silicon wafer of 125 (5) mm diameter, as a manometer membrane, in a Fizeau interferometer; to evaluate the global behavior of the wafer; we observed the deformation pattern of the wafer and its mechanical characteristics. From the experimental data obtained we evaluated the possible characteristics of the micro-membrane used in the pressure sensor. The second step will be to measure directly with the Michelson microscopic interferometer, the displacement of the micromembrane as a function of pressure." @default.
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- W1901357711 date "2002-11-13" @default.
- W1901357711 modified "2023-09-26" @default.
- W1901357711 title "Interferometric set-up for assessment of a microphotonic pressure sensor" @default.
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- W1901357711 doi "https://doi.org/10.1109/smicnd.2001.967489" @default.
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