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• W1902013552 abstract "Abstract : For this project, MESA (MEMS Early-Stage Analysis) was implemented to develop ,tri state multi-contact switch. The switch was designed and processed to enhance mechanical and RF performance compare to the conventional RF MEMS switches. The switch was successfully fabricated using Metal MUMPs (Thick Metal deposition) process. It demonstrated 107 cycles of switching and 0.5 dB insertion loss. This RF MEMS can be further developed for future advanced RF communications systems for the space based and superior air applications." @default.
• W1902013552 created "2016-06-24" @default.
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• W1902013552 date "2005-12-09" @default.
• W1902013552 modified "2023-09-27" @default.
• W1902013552 title "Micromachined RF Switch With High Mechanical Reliability" @default.
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