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- W1906543202 abstract "In this work we present a locally developed MEMS-based technology for the assembly and characterization of optical MEMS components. For the assembly purpose, the processes required for the Si and glass micromachining (oxidation, photolithography and wet etching) are developed in the Laser lab at the faculty of Engineering, Ain Shams University. For the characterization purpose, an automated set-up for the spot size and misalignment loss measurements are developed." @default.
- W1906543202 created "2016-06-24" @default.
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- W1906543202 date "2003-06-25" @default.
- W1906543202 modified "2023-09-26" @default.
- W1906543202 title "Assembly and characterization of optical MEMS (micro-electro-mechanical systems)" @default.
- W1906543202 doi "https://doi.org/10.1109/paia.2002.995083" @default.
- W1906543202 hasPublicationYear "2003" @default.
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