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- W19095576 abstract "This paper describes real-time feedback control of electron in a low pressure, capacitively coupled RF plasma chamber. Experimental results are presented which demonstrate that a PI controller enables effective control of electron density when radio frequency power is used as an actuator. A hairpin resonator probe is used to measure the electron density, when the resonator is placed in plasma, its characteristic resonance frequency in vacuum shifts to a higher value. From the frequency shifts, electron density can be easily determined. Actuation and data acquisition are implemented with NI CompactRIO™." @default.
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- W19095576 date "2010-11-30" @default.
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- W19095576 title "Real-time control of electron density in low pressure plasma" @default.
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