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- W1910505155 abstract "Freestanding polycrystalline diamond films produced by Microwave Plasma Chemical Vapor Deposition (MWCVD) were investigated for high power and high temperature electronic applications. The diamond films were deposited on polished tungsten substrates using 5000 W to I500 W power, 15.33 kPa pressure, methane-hydrogen-oxygen precursor gas between 0.5% CH/sub 4/ and 95% CH/sub 4/, oxygen/carbon ratio between 0 and 0.33, and temperature from 600/spl deg/C to 900/spl deg/C. The diamond film parted from the substrate as the samples cooled after deposition due to the difference in the thermal expansion coefficients of diamond and tungsten. Cohesive freestanding films of randomly oriented polycrystalline diamond were obtained ranging from 10 /spl mu/m to 150 /spl mu/m thick Either aluminum or tungsten metal contacts were deposited on the diamond to form parallel plate capacitors. Electrical measurements were performed before and after annealing. The dielectric constant and the loss tangent at temperatures from 23/spl deg/C to 300/spl deg/C were determined from capacitance measurements over a 20 Hz to 1 MHz frequency range. The effect of methane concentration, oxygen concentration, deposition temperature and annealing on the frequency and temperature stability of the dielectric properties of CVD diamond capacitors was investigated. Dielectric constants ranging between 8.0 and 4.2 and resistivities between 1/spl times/10/sup 8/ ohm-cm and 5/spl times/10/sup 14/ ohm-cm were obtained for the diamond samples." @default.
- W1910505155 created "2016-06-24" @default.
- W1910505155 creator A5002950655 @default.
- W1910505155 creator A5012493445 @default.
- W1910505155 creator A5027911226 @default.
- W1910505155 creator A5081706595 @default.
- W1910505155 creator A5082304503 @default.
- W1910505155 date "2002-11-27" @default.
- W1910505155 modified "2023-09-26" @default.
- W1910505155 title "Dielectric characterization of microwave assisted chemically vapor deposited diamond" @default.
- W1910505155 cites W1595115393 @default.
- W1910505155 cites W1597311483 @default.
- W1910505155 cites W2044118263 @default.
- W1910505155 cites W2048340198 @default.
- W1910505155 cites W2054444376 @default.
- W1910505155 cites W2062019837 @default.
- W1910505155 cites W2062823550 @default.
- W1910505155 cites W2070618924 @default.
- W1910505155 cites W2080346881 @default.
- W1910505155 cites W2085892037 @default.
- W1910505155 cites W2086972433 @default.
- W1910505155 cites W2109571422 @default.
- W1910505155 doi "https://doi.org/10.1109/naecon.1998.710124" @default.
- W1910505155 hasPublicationYear "2002" @default.
- W1910505155 type Work @default.
- W1910505155 sameAs 1910505155 @default.
- W1910505155 citedByCount "2" @default.
- W1910505155 countsByYear W19105051552015 @default.
- W1910505155 countsByYear W19105051552017 @default.
- W1910505155 crossrefType "proceedings-article" @default.
- W1910505155 hasAuthorship W1910505155A5002950655 @default.
- W1910505155 hasAuthorship W1910505155A5012493445 @default.
- W1910505155 hasAuthorship W1910505155A5027911226 @default.
- W1910505155 hasAuthorship W1910505155A5081706595 @default.
- W1910505155 hasAuthorship W1910505155A5082304503 @default.
- W1910505155 hasConcept C113196181 @default.
- W1910505155 hasConcept C133386390 @default.
- W1910505155 hasConcept C159985019 @default.
- W1910505155 hasConcept C185592680 @default.
- W1910505155 hasConcept C191897082 @default.
- W1910505155 hasConcept C192562407 @default.
- W1910505155 hasConcept C2776921476 @default.
- W1910505155 hasConcept C2777855556 @default.
- W1910505155 hasConcept C43617362 @default.
- W1910505155 hasConcept C49040817 @default.
- W1910505155 hasConcept C542268612 @default.
- W1910505155 hasConcept C57410435 @default.
- W1910505155 hasConceptScore W1910505155C113196181 @default.
- W1910505155 hasConceptScore W1910505155C133386390 @default.
- W1910505155 hasConceptScore W1910505155C159985019 @default.
- W1910505155 hasConceptScore W1910505155C185592680 @default.
- W1910505155 hasConceptScore W1910505155C191897082 @default.
- W1910505155 hasConceptScore W1910505155C192562407 @default.
- W1910505155 hasConceptScore W1910505155C2776921476 @default.
- W1910505155 hasConceptScore W1910505155C2777855556 @default.
- W1910505155 hasConceptScore W1910505155C43617362 @default.
- W1910505155 hasConceptScore W1910505155C49040817 @default.
- W1910505155 hasConceptScore W1910505155C542268612 @default.
- W1910505155 hasConceptScore W1910505155C57410435 @default.
- W1910505155 hasLocation W19105051551 @default.
- W1910505155 hasOpenAccess W1910505155 @default.
- W1910505155 hasPrimaryLocation W19105051551 @default.
- W1910505155 hasRelatedWork W1497506671 @default.
- W1910505155 hasRelatedWork W1547968428 @default.
- W1910505155 hasRelatedWork W1772037104 @default.
- W1910505155 hasRelatedWork W1802765991 @default.
- W1910505155 hasRelatedWork W1893309713 @default.
- W1910505155 hasRelatedWork W1981790345 @default.
- W1910505155 hasRelatedWork W2009125144 @default.
- W1910505155 hasRelatedWork W2062019837 @default.
- W1910505155 hasRelatedWork W2066730350 @default.
- W1910505155 hasRelatedWork W2079543631 @default.
- W1910505155 hasRelatedWork W2101286387 @default.
- W1910505155 hasRelatedWork W2136781953 @default.
- W1910505155 hasRelatedWork W2141564424 @default.
- W1910505155 hasRelatedWork W2144228799 @default.
- W1910505155 hasRelatedWork W2161225850 @default.
- W1910505155 hasRelatedWork W2170962933 @default.
- W1910505155 hasRelatedWork W2335762675 @default.
- W1910505155 hasRelatedWork W2532073549 @default.
- W1910505155 hasRelatedWork W2533917022 @default.
- W1910505155 hasRelatedWork W2133751006 @default.
- W1910505155 isParatext "false" @default.
- W1910505155 isRetracted "false" @default.
- W1910505155 magId "1910505155" @default.
- W1910505155 workType "article" @default.