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- W1914538131 abstract "Micro-Hall sensors made of Bi have been previously fabricated and have shown interesting properties for magnetic field detection. In this project, new ideas to improve the performance of these Hall sensors and to explore ferromagnetic metals are developed. Ni and Bi protected with Al2O3 are used as materials to realize the sensing element. Different thicknesses between 10 and 100 nm of Ni and Bi are deposited by evaporation and structured with lift-off. The electrodes are made of Ti/Al. A Pt thin film is deposited between the sensor and the electrodes to improve electrical contact. Two SU-8 layers are structured with the standard photolithography process to build a cantilever and a carrier chip. Release of the sensor chip is performed with ICP SF6 plasma to etch the poly-Silicon layer." @default.
- W1914538131 created "2016-06-24" @default.
- W1914538131 creator A5044769753 @default.
- W1914538131 creator A5059096186 @default.
- W1914538131 creator A5063059691 @default.
- W1914538131 date "2006-01-01" @default.
- W1914538131 modified "2023-09-27" @default.
- W1914538131 title "MICRO-HALL SENSORS ON SU-8 CANTILEVERS FOR MAGNETIC IMAGINIG" @default.
- W1914538131 hasPublicationYear "2006" @default.
- W1914538131 type Work @default.
- W1914538131 sameAs 1914538131 @default.
- W1914538131 citedByCount "0" @default.
- W1914538131 crossrefType "journal-article" @default.
- W1914538131 hasAuthorship W1914538131A5044769753 @default.
- W1914538131 hasAuthorship W1914538131A5059096186 @default.
- W1914538131 hasAuthorship W1914538131A5063059691 @default.
- W1914538131 hasConcept C105487726 @default.
- W1914538131 hasConcept C107637996 @default.
- W1914538131 hasConcept C115260700 @default.
- W1914538131 hasConcept C119599485 @default.
- W1914538131 hasConcept C121332964 @default.
- W1914538131 hasConcept C127413603 @default.
- W1914538131 hasConcept C134112204 @default.
- W1914538131 hasConcept C141354745 @default.
- W1914538131 hasConcept C147789679 @default.
- W1914538131 hasConcept C159985019 @default.
- W1914538131 hasConcept C16389437 @default.
- W1914538131 hasConcept C165005293 @default.
- W1914538131 hasConcept C171250308 @default.
- W1914538131 hasConcept C17525397 @default.
- W1914538131 hasConcept C185592680 @default.
- W1914538131 hasConcept C19067145 @default.
- W1914538131 hasConcept C192562407 @default.
- W1914538131 hasConcept C49040817 @default.
- W1914538131 hasConcept C62520636 @default.
- W1914538131 hasConcept C69990965 @default.
- W1914538131 hasConcept C82217956 @default.
- W1914538131 hasConceptScore W1914538131C105487726 @default.
- W1914538131 hasConceptScore W1914538131C107637996 @default.
- W1914538131 hasConceptScore W1914538131C115260700 @default.
- W1914538131 hasConceptScore W1914538131C119599485 @default.
- W1914538131 hasConceptScore W1914538131C121332964 @default.
- W1914538131 hasConceptScore W1914538131C127413603 @default.
- W1914538131 hasConceptScore W1914538131C134112204 @default.
- W1914538131 hasConceptScore W1914538131C141354745 @default.
- W1914538131 hasConceptScore W1914538131C147789679 @default.
- W1914538131 hasConceptScore W1914538131C159985019 @default.
- W1914538131 hasConceptScore W1914538131C16389437 @default.
- W1914538131 hasConceptScore W1914538131C165005293 @default.
- W1914538131 hasConceptScore W1914538131C171250308 @default.
- W1914538131 hasConceptScore W1914538131C17525397 @default.
- W1914538131 hasConceptScore W1914538131C185592680 @default.
- W1914538131 hasConceptScore W1914538131C19067145 @default.
- W1914538131 hasConceptScore W1914538131C192562407 @default.
- W1914538131 hasConceptScore W1914538131C49040817 @default.
- W1914538131 hasConceptScore W1914538131C62520636 @default.
- W1914538131 hasConceptScore W1914538131C69990965 @default.
- W1914538131 hasConceptScore W1914538131C82217956 @default.
- W1914538131 hasLocation W19145381311 @default.
- W1914538131 hasOpenAccess W1914538131 @default.
- W1914538131 hasPrimaryLocation W19145381311 @default.
- W1914538131 hasRelatedWork W1965386247 @default.
- W1914538131 hasRelatedWork W1967821852 @default.
- W1914538131 hasRelatedWork W1968574432 @default.
- W1914538131 hasRelatedWork W1986394536 @default.
- W1914538131 hasRelatedWork W2013079801 @default.
- W1914538131 hasRelatedWork W2015360240 @default.
- W1914538131 hasRelatedWork W2027231957 @default.
- W1914538131 hasRelatedWork W2038046998 @default.
- W1914538131 hasRelatedWork W2041864735 @default.
- W1914538131 hasRelatedWork W2047652035 @default.
- W1914538131 hasRelatedWork W2067483239 @default.
- W1914538131 hasRelatedWork W2083488951 @default.
- W1914538131 hasRelatedWork W2141629214 @default.
- W1914538131 hasRelatedWork W2175940454 @default.
- W1914538131 hasRelatedWork W2220114435 @default.
- W1914538131 hasRelatedWork W2249017928 @default.
- W1914538131 hasRelatedWork W2327100644 @default.
- W1914538131 hasRelatedWork W2342995766 @default.
- W1914538131 hasRelatedWork W2438548618 @default.
- W1914538131 hasRelatedWork W2755396205 @default.
- W1914538131 isParatext "false" @default.
- W1914538131 isRetracted "false" @default.
- W1914538131 magId "1914538131" @default.
- W1914538131 workType "article" @default.