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- W1919192912 abstract "The paper deals with a polymer as a kind of carbon material obtained by the pyrolysis of polymers. A pyrolysis process is executed by a heat treatment in the absence of O/sub 2/. Various polymer materials utilized in are potential precursors of polymers. Micromachining of polymers has allowed various polymer structures. Polymer structures can be transformed into pyrolyzed polymer MEMS for various applications. This work focuses on the semiconductivity of a polymer derived from popular polymer materials in MEMS. A measurement of the Hall effect provides information on the semiconductivity of polymer. A diode is designed and demonstrated as the first step in the application of the semiconductive polymer." @default.
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- W1919192912 date "2005-08-24" @default.
- W1919192912 modified "2023-09-26" @default.
- W1919192912 title "Semiconductivity of pyrolyzed polymer for MEMS application" @default.
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- W1919192912 doi "https://doi.org/10.1109/sensor.2005.1496409" @default.
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