Matches in SemOpenAlex for { <https://semopenalex.org/work/W1919446918> ?p ?o ?g. }
Showing items 1 to 85 of
85
with 100 items per page.
- W1919446918 abstract "The dimension control technology for silicon photonics devices based on 40-nm-node CMOS technology are reviewed. By using ArF immersion lithography in the fabrication technology, the high-level reproducihility in resonant wavelength of demultiplexers (σλ. <1 nm) was achieved, as well as extremely low propagation loss <0.5 dB/cm in silicon wire waveguide for TE single mode propagation in C-band." @default.
- W1919446918 created "2016-06-24" @default.
- W1919446918 creator A5028298135 @default.
- W1919446918 creator A5030935655 @default.
- W1919446918 date "2015-08-01" @default.
- W1919446918 modified "2023-09-26" @default.
- W1919446918 title "Ultra-fme Si photonics fabrication technology based on 40-nm-node CMOS process" @default.
- W1919446918 cites W1984172450 @default.
- W1919446918 cites W2004891041 @default.
- W1919446918 cites W2028653855 @default.
- W1919446918 cites W2118758256 @default.
- W1919446918 cites W2148825639 @default.
- W1919446918 doi "https://doi.org/10.1109/group4.2015.7305906" @default.
- W1919446918 hasPublicationYear "2015" @default.
- W1919446918 type Work @default.
- W1919446918 sameAs 1919446918 @default.
- W1919446918 citedByCount "0" @default.
- W1919446918 crossrefType "proceedings-article" @default.
- W1919446918 hasAuthorship W1919446918A5028298135 @default.
- W1919446918 hasAuthorship W1919446918A5030935655 @default.
- W1919446918 hasConcept C119423029 @default.
- W1919446918 hasConcept C127413603 @default.
- W1919446918 hasConcept C136525101 @default.
- W1919446918 hasConcept C142724271 @default.
- W1919446918 hasConcept C171250308 @default.
- W1919446918 hasConcept C192562407 @default.
- W1919446918 hasConcept C200687136 @default.
- W1919446918 hasConcept C204223013 @default.
- W1919446918 hasConcept C204787440 @default.
- W1919446918 hasConcept C20788544 @default.
- W1919446918 hasConcept C2779227376 @default.
- W1919446918 hasConcept C46362747 @default.
- W1919446918 hasConcept C49040817 @default.
- W1919446918 hasConcept C53524968 @default.
- W1919446918 hasConcept C544956773 @default.
- W1919446918 hasConcept C62611344 @default.
- W1919446918 hasConcept C66938386 @default.
- W1919446918 hasConcept C71924100 @default.
- W1919446918 hasConcept C94263209 @default.
- W1919446918 hasConceptScore W1919446918C119423029 @default.
- W1919446918 hasConceptScore W1919446918C127413603 @default.
- W1919446918 hasConceptScore W1919446918C136525101 @default.
- W1919446918 hasConceptScore W1919446918C142724271 @default.
- W1919446918 hasConceptScore W1919446918C171250308 @default.
- W1919446918 hasConceptScore W1919446918C192562407 @default.
- W1919446918 hasConceptScore W1919446918C200687136 @default.
- W1919446918 hasConceptScore W1919446918C204223013 @default.
- W1919446918 hasConceptScore W1919446918C204787440 @default.
- W1919446918 hasConceptScore W1919446918C20788544 @default.
- W1919446918 hasConceptScore W1919446918C2779227376 @default.
- W1919446918 hasConceptScore W1919446918C46362747 @default.
- W1919446918 hasConceptScore W1919446918C49040817 @default.
- W1919446918 hasConceptScore W1919446918C53524968 @default.
- W1919446918 hasConceptScore W1919446918C544956773 @default.
- W1919446918 hasConceptScore W1919446918C62611344 @default.
- W1919446918 hasConceptScore W1919446918C66938386 @default.
- W1919446918 hasConceptScore W1919446918C71924100 @default.
- W1919446918 hasConceptScore W1919446918C94263209 @default.
- W1919446918 hasLocation W19194469181 @default.
- W1919446918 hasOpenAccess W1919446918 @default.
- W1919446918 hasPrimaryLocation W19194469181 @default.
- W1919446918 hasRelatedWork W1568633967 @default.
- W1919446918 hasRelatedWork W1964624196 @default.
- W1919446918 hasRelatedWork W1991142701 @default.
- W1919446918 hasRelatedWork W2026363137 @default.
- W1919446918 hasRelatedWork W2124306397 @default.
- W1919446918 hasRelatedWork W2159825453 @default.
- W1919446918 hasRelatedWork W2163245890 @default.
- W1919446918 hasRelatedWork W2508256665 @default.
- W1919446918 hasRelatedWork W2548925038 @default.
- W1919446918 hasRelatedWork W25912318 @default.
- W1919446918 hasRelatedWork W2591833179 @default.
- W1919446918 hasRelatedWork W2616057195 @default.
- W1919446918 hasRelatedWork W2745059425 @default.
- W1919446918 hasRelatedWork W2807795365 @default.
- W1919446918 hasRelatedWork W2938474813 @default.
- W1919446918 hasRelatedWork W2966189700 @default.
- W1919446918 hasRelatedWork W2996427270 @default.
- W1919446918 hasRelatedWork W3146728323 @default.
- W1919446918 hasRelatedWork W3146899625 @default.
- W1919446918 hasRelatedWork W3212599565 @default.
- W1919446918 isParatext "false" @default.
- W1919446918 isRetracted "false" @default.
- W1919446918 magId "1919446918" @default.
- W1919446918 workType "article" @default.