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• W1920021921 endingPage "P264" @default.
• W1920021921 startingPage "P258" @default.
• W1920021921 abstract "The Silicon on Lattice Engineered Substrate (SOLES) platform enables monolithic integration of III-V compound semiconductor (III-V) and silicon (Si) complementary metal oxide semiconductor (CMOS) devices. The SOLES wafer provides a device quality Si-on-Insulator (SOI) layer for CMOS device fabrication and an embedded III-V device template layer which serves as a seed surface for epitaxial growth of III-V devices. In this work, different approaches for fabricating SOLES wafers comprised of Ge and InP template layers are characterized and InP-based SOLES structures are demonstrated for the first time. Ge-based SOLES are robust for long durations at temperatures up to 915°C and Ge diffusion can be controlled by engineering the oxide isolation layers adjacent to the Ge. InP SOLES structures alleviate lattice and thermal expansion mismatches between the template layer and subsequent device layers. Although allowable processing temperatures for these wafers had been expected to be higher due to the higher melting temperature of InP, high indium diffusion through the SiO2 and InP melting actually lead to lower thermal stability. This research elucidates approaches to enhance the process flexibility and wafer integrity of Ge-based and InP-based SOLES." @default.
• W1920021921 created "2016-06-24" @default.
• W1920021921 creator A5005790097 @default.
• W1920021921 creator A5012764487 @default.
• W1920021921 creator A5023444467 @default.
• W1920021921 creator A5068185902 @default.
• W1920021921 creator A5068845081 @default.
• W1920021921 date "2015-01-01" @default.
• W1920021921 modified "2023-09-30" @default.
• W1920021921 title "Fabrication and Thermal Budget Considerations of Advanced Ge and InP SOLES Substrates" @default.
• W1920021921 cites W1971282464 @default.
• W1920021921 cites W1972751637 @default.
• W1920021921 cites W1976693025 @default.
• W1920021921 cites W1977116192 @default.
• W1920021921 cites W1985726976 @default.
• W1920021921 cites W1986112690 @default.
• W1920021921 cites W1986113429 @default.
• W1920021921 cites W1996220143 @default.
• W1920021921 cites W1997182640 @default.
• W1920021921 cites W2004995276 @default.
• W1920021921 cites W2011889651 @default.
• W1920021921 cites W2014203919 @default.
• W1920021921 cites W2023980047 @default.
• W1920021921 cites W2024957718 @default.
• W1920021921 cites W2028636895 @default.
• W1920021921 cites W2034645508 @default.
• W1920021921 cites W2037302421 @default.
• W1920021921 cites W2045276202 @default.
• W1920021921 cites W2052551295 @default.
• W1920021921 cites W2067652564 @default.
• W1920021921 cites W2073813434 @default.
• W1920021921 cites W2090367488 @default.
• W1920021921 cites W2095354988 @default.
• W1920021921 cites W2115762052 @default.
• W1920021921 cites W2117579725 @default.
• W1920021921 cites W2162759132 @default.
• W1920021921 cites W2163198667 @default.
• W1920021921 cites W2164165073 @default.
• W1920021921 doi "https://doi.org/10.1149/2.0221507jss" @default.
• W1920021921 hasPublicationYear "2015" @default.
• W1920021921 type Work @default.
• W1920021921 sameAs 1920021921 @default.
• W1920021921 citedByCount "6" @default.
• W1920021921 countsByYear W19200219212016 @default.
• W1920021921 countsByYear W19200219212017 @default.
• W1920021921 countsByYear W19200219212019 @default.
• W1920021921 countsByYear W19200219212021 @default.
• W1920021921 crossrefType "journal-article" @default.
• W1920021921 hasAuthorship W1920021921A5005790097 @default.
• W1920021921 hasAuthorship W1920021921A5012764487 @default.
• W1920021921 hasAuthorship W1920021921A5023444467 @default.
• W1920021921 hasAuthorship W1920021921A5068185902 @default.
• W1920021921 hasAuthorship W1920021921A5068845081 @default.
• W1920021921 hasBestOaLocation W19200219212 @default.
• W1920021921 hasConcept C108225325 @default.
• W1920021921 hasConcept C110738630 @default.
• W1920021921 hasConcept C111368507 @default.
• W1920021921 hasConcept C127313418 @default.
• W1920021921 hasConcept C136525101 @default.
• W1920021921 hasConcept C142724271 @default.
• W1920021921 hasConcept C160671074 @default.
• W1920021921 hasConcept C171250308 @default.
• W1920021921 hasConcept C192562407 @default.
• W1920021921 hasConcept C204787440 @default.
• W1920021921 hasConcept C2777289219 @default.
• W1920021921 hasConcept C2779227376 @default.
• W1920021921 hasConcept C49040817 @default.
• W1920021921 hasConcept C53143962 @default.
• W1920021921 hasConcept C543292547 @default.
• W1920021921 hasConcept C544956773 @default.
• W1920021921 hasConcept C71924100 @default.
• W1920021921 hasConceptScore W1920021921C108225325 @default.
• W1920021921 hasConceptScore W1920021921C110738630 @default.
• W1920021921 hasConceptScore W1920021921C111368507 @default.
• W1920021921 hasConceptScore W1920021921C127313418 @default.
• W1920021921 hasConceptScore W1920021921C136525101 @default.
• W1920021921 hasConceptScore W1920021921C142724271 @default.
• W1920021921 hasConceptScore W1920021921C160671074 @default.
• W1920021921 hasConceptScore W1920021921C171250308 @default.
• W1920021921 hasConceptScore W1920021921C192562407 @default.
• W1920021921 hasConceptScore W1920021921C204787440 @default.
• W1920021921 hasConceptScore W1920021921C2777289219 @default.
• W1920021921 hasConceptScore W1920021921C2779227376 @default.
• W1920021921 hasConceptScore W1920021921C49040817 @default.
• W1920021921 hasConceptScore W1920021921C53143962 @default.
• W1920021921 hasConceptScore W1920021921C543292547 @default.
• W1920021921 hasConceptScore W1920021921C544956773 @default.
• W1920021921 hasConceptScore W1920021921C71924100 @default.
• W1920021921 hasIssue "7" @default.
• W1920021921 hasLocation W19200219211 @default.
• W1920021921 hasLocation W19200219212 @default.
• W1920021921 hasOpenAccess W1920021921 @default.
• W1920021921 hasPrimaryLocation W19200219211 @default.
• W1920021921 hasRelatedWork W1536397480 @default.
• W1920021921 hasRelatedWork W1982635368 @default.
• W1920021921 hasRelatedWork W2003725703 @default.
• W1920021921 hasRelatedWork W2010481829 @default.
• W1920021921 hasRelatedWork W2031003934 @default.

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