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- W1920936626 abstract "A comparative study was done between ethylene diamine-pyrocatechol (EDP) and potassium hydroxide (KOH) etching systems for micromachining mesas in" @default.
- W1920936626 created "2016-06-24" @default.
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- W1920936626 date "2003-01-06" @default.
- W1920936626 modified "2023-09-23" @default.
- W1920936626 title "Mesa structure formation using potassium hydroxide and ethylene diamine based etchants" @default.
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- W1920936626 doi "https://doi.org/10.1109/solsen.1988.26446" @default.
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