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• W1925590410 abstract "We present micromirrors actuated by self-aligned, high aspect ratio, vertical electrostatic combdrives with multi-level electrical isolation that allows bi-directional and dual-mode (independent rotation and piston motion) operation. The fabrication process is based on self-aligned DRIE of SOI wafers with two device layers. The two oxide layers provide electrode isolation and etch stops for thickness control. Only front-side processing is required. We demonstrate micromirrors of this type with /spl plusmn/9 degrees of optical scanning and 7.5 /spl mu/m of piston motion under static actuation. Micromirrors designed for resonant scanning have optical scan angles up to /spl plusmn/25 degrees at 13.5 kHz." @default.
• W1925590410 created "2016-06-24" @default.
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• W1925590410 date "2004-05-06" @default.
• W1925590410 modified "2023-09-27" @default.
• W1925590410 title "High-resolution, high-speed microscanner in single-crystalline silicon actuated by self-aligned dual-mode vertical electrostatic combdrive with capability for phased array operation" @default.
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• W1925590410 doi "https://doi.org/10.1109/sensor.2003.1215382" @default.
• W1925590410 hasPublicationYear "2004" @default.
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