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- W1925933063 abstract "This paper reports fabrication and preliminary test results of oxide-coated polysilicon disk resonator gyroscopes (DRG) in a wafer-scale encapsulation. With this thin oxide coating, surface roughness of a fully encapsulated device was reduced by 10x, increasing the uniformity across the wafer. We also demonstrate the effects of oxide coating on key performance parameters of resonant-based sensors such as temperature coefficient of frequency (TCF) and quality factor (Q). Preliminary results show more than 30% increase in Q (75k) at 217kHz resonant frequency." @default.
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- W1925933063 date "2015-03-01" @default.
- W1925933063 modified "2023-09-23" @default.
- W1925933063 title "Oxide-coated polysilicon disk resonator gyroscope (DRG) within the wafer-scale encapsulation process" @default.
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- W1925933063 doi "https://doi.org/10.1109/isiss.2015.7102392" @default.
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