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- W1927777740 abstract "Electromagnetic simulations have been performed on a hypothetical device structure showing that electric field strengths around large metal structures can be close to electric breakdown, in particular in low-k materials. A plasma reactor design is presented leading to a large window of operation, free of wafer arcing." @default.
- W1927777740 created "2016-06-24" @default.
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- W1927777740 date "2003-06-25" @default.
- W1927777740 modified "2023-09-24" @default.
- W1927777740 title "Wafer arcing phenomena and resolution through a capacitively coupled low gap plasma reactor" @default.
- W1927777740 doi "https://doi.org/10.1109/ppid.2002.1042626" @default.
- W1927777740 hasPublicationYear "2003" @default.
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