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- W1927859301 abstract "Investigative studies to improve the resistance to plasma process-induced damage and data-retention time of ONO in flash memory devices via a rapid thermal nitridation (RTN) process in N/sub 2/O ambient have been carried out. Experimental results revealed that an extra RTN step (1050/spl deg/C, 30 s) after nitride deposition during ONO growth indeed leads to a better quality stacked dielectric layer over the conventional process. Brief explanations of the beneficial effects of RTN are provided in this paper." @default.
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- W1927859301 date "2003-01-20" @default.
- W1927859301 modified "2023-09-24" @default.
- W1927859301 title "Evaluation of rapid thermal nitrided ONO interpoly dielectric resistance to plasma process-induced damage" @default.
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- W1927859301 doi "https://doi.org/10.1109/ppid.1999.798806" @default.
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