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- W192801735 abstract "The effects of high-temperature process required to fabricate the SiC devices on the surface morphology and the electrical characteristics were investigated for 4H-SiC Schottky diodes. The 4H-SiC diodes without a graphite cap layer as a protection layer showed catastrophic increase in an excess current at a forward bias and a leakage current at a reverse bias after high-temperature annealing process. Moreover it seemed to deviate from the conventional Schottky characteristics and to operate as an ohmic contact at the low bias regime. However, the 4H-SiC diodes with the graphite cap still exhibited their good electrical characteristics in spite of a slight increase in the leakage current. Therefore, we found that the graphite cap layer serves well as the protection layer of silicon carbide surface during high-temperature annealing. Based on a closer analysis on electric characteristics, a conductive surface transfiguration layer was suspected to form on the surface of diodes without the graphite cap layer during high-temperature annealing. After removing the surface transfiguration layer using ICP-RIE, Schottky diode without the graphite cap layer and having poor electrical characteristics showed a dramatic improvement in its characteristics including the ideality factor[] of 1.23, the schottky barrier height[] of 1.39 eV, and the leakage current of at the reverse bias of -10 V." @default.
- W192801735 created "2016-06-24" @default.
- W192801735 date "2006-09-01" @default.
- W192801735 modified "2023-09-25" @default.
- W192801735 title "Effect of High Temperature Annealing on the Characteristics of SiC Schottky Diodes" @default.
- W192801735 cites W2050285455 @default.
- W192801735 cites W2121261508 @default.
- W192801735 doi "https://doi.org/10.4313/jkem.2006.19.9.818" @default.
- W192801735 hasPublicationYear "2006" @default.
- W192801735 type Work @default.
- W192801735 sameAs 192801735 @default.
- W192801735 citedByCount "0" @default.
- W192801735 crossrefType "journal-article" @default.
- W192801735 hasBestOaLocation W1928017351 @default.
- W192801735 hasConcept C138230450 @default.
- W192801735 hasConcept C139719470 @default.
- W192801735 hasConcept C159985019 @default.
- W192801735 hasConcept C16115445 @default.
- W192801735 hasConcept C162324750 @default.
- W192801735 hasConcept C192562407 @default.
- W192801735 hasConcept C205200001 @default.
- W192801735 hasConcept C20615193 @default.
- W192801735 hasConcept C2777042071 @default.
- W192801735 hasConcept C2777855556 @default.
- W192801735 hasConcept C2779227376 @default.
- W192801735 hasConcept C2779698641 @default.
- W192801735 hasConcept C2780722187 @default.
- W192801735 hasConcept C49040817 @default.
- W192801735 hasConcept C5667319 @default.
- W192801735 hasConcept C78434282 @default.
- W192801735 hasConceptScore W192801735C138230450 @default.
- W192801735 hasConceptScore W192801735C139719470 @default.
- W192801735 hasConceptScore W192801735C159985019 @default.
- W192801735 hasConceptScore W192801735C16115445 @default.
- W192801735 hasConceptScore W192801735C162324750 @default.
- W192801735 hasConceptScore W192801735C192562407 @default.
- W192801735 hasConceptScore W192801735C205200001 @default.
- W192801735 hasConceptScore W192801735C20615193 @default.
- W192801735 hasConceptScore W192801735C2777042071 @default.
- W192801735 hasConceptScore W192801735C2777855556 @default.
- W192801735 hasConceptScore W192801735C2779227376 @default.
- W192801735 hasConceptScore W192801735C2779698641 @default.
- W192801735 hasConceptScore W192801735C2780722187 @default.
- W192801735 hasConceptScore W192801735C49040817 @default.
- W192801735 hasConceptScore W192801735C5667319 @default.
- W192801735 hasConceptScore W192801735C78434282 @default.
- W192801735 hasLocation W1928017351 @default.
- W192801735 hasOpenAccess W192801735 @default.
- W192801735 hasPrimaryLocation W1928017351 @default.
- W192801735 hasRelatedWork W1972411039 @default.
- W192801735 hasRelatedWork W1976058171 @default.
- W192801735 hasRelatedWork W2009250851 @default.
- W192801735 hasRelatedWork W2030512865 @default.
- W192801735 hasRelatedWork W2056938397 @default.
- W192801735 hasRelatedWork W2086756978 @default.
- W192801735 hasRelatedWork W2124223348 @default.
- W192801735 hasRelatedWork W2170019241 @default.
- W192801735 hasRelatedWork W2614156624 @default.
- W192801735 hasRelatedWork W3120723223 @default.
- W192801735 isParatext "false" @default.
- W192801735 isRetracted "false" @default.
- W192801735 magId "192801735" @default.
- W192801735 workType "article" @default.