FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1929124472> ?p ?o ?g. }

• W1929124472 abstract "Abstract The organic contamination has been recently considered as the most important problem for the photolithography world in the semiconductor industry, especially when the photolithographic methods moved from 130 nm node to 32 nm node. One of the most common organic compounds found in photolithography areas of the clean room is Trimethylsilanol (TMS), which can adsorb on the optical lenses forming a thin molecular layer, hence causing damages. Salt crystal formation is another potential threat for the optical devices. In the clean rooms, this salt is produced by a light-induced reaction between ammonia and an acid. In the context of semiconductor industry, the involved acid is usually the acetic acid produced by hydrolysis from propylene glycol methyl ether acetate (PGMEA), a commonly used organic compound in the photolithography. Here, we present an innovative analytical method using a state-of-the-art proton-transfer reaction–time-of-flight–mass spectrometer (PTR–ToF–MS) for on-line and continuous survey of volatile organic compounds (VOCs) with an emphasis on TMS and PGMEA. The effect of relative humidity on the detection and fragmentation of these organic compounds was assessed. The new analytical method is operated in a real life clean room environment and the results were compared with those obtained with off-line measurements using automated thermal desorber–gas chromatography–mass spectrometry (ATD–GC–MS) as reference method. The contamination sources were detected and identified, which is of paramount importance for the microelectronic fabrication plant. The trapping efficiency of the chemical filters used for AMCs filtration in the photolithography zone was determined." @default.
• W1929124472 created "2016-06-24" @default.
• W1929124472 creator A5020965679 @default.
• W1929124472 creator A5035650109 @default.
• W1929124472 creator A5042730011 @default.
• W1929124472 creator A5052803675 @default.
• W1929124472 creator A5062555283 @default.
• W1929124472 creator A5066079599 @default.
• W1929124472 creator A5075557725 @default.
• W1929124472 creator A5083447932 @default.
• W1929124472 creator A5085823900 @default.
• W1929124472 creator A5086873823 @default.
• W1929124472 creator A5087243601 @default.
• W1929124472 date "2015-12-01" @default.
• W1929124472 modified "2023-10-06" @default.
• W1929124472 title "Monitoring of organic contamination in the ambient air of microelectronic clean room by proton-transfer reaction/time-of-flight/mass spectrometry (PTR–ToF–MS)" @default.
• W1929124472 cites W1964398410 @default.
• W1929124472 cites W1969873001 @default.
• W1929124472 cites W1979329039 @default.
• W1929124472 cites W1984948015 @default.
• W1929124472 cites W1997141017 @default.
• W1929124472 cites W1998246830 @default.
• W1929124472 cites W2000482463 @default.
• W1929124472 cites W2011313559 @default.
• W1929124472 cites W2013287304 @default.
• W1929124472 cites W2024877863 @default.
• W1929124472 cites W2029148788 @default.
• W1929124472 cites W2033230301 @default.
• W1929124472 cites W2034173602 @default.
• W1929124472 cites W2038177583 @default.
• W1929124472 cites W2044033574 @default.
• W1929124472 cites W2047457654 @default.
• W1929124472 cites W2051872186 @default.
• W1929124472 cites W2052087079 @default.
• W1929124472 cites W2054801034 @default.
• W1929124472 cites W2056554426 @default.
• W1929124472 cites W2093307996 @default.
• W1929124472 cites W2094091431 @default.
• W1929124472 cites W2104344302 @default.
• W1929124472 cites W2120609860 @default.
• W1929124472 cites W2145917517 @default.
• W1929124472 cites W2162064655 @default.
• W1929124472 cites W2291390900 @default.
• W1929124472 cites W2324501227 @default.
• W1929124472 cites W2334266733 @default.
• W1929124472 cites W3119695872 @default.
• W1929124472 cites W1972545356 @default.
• W1929124472 doi "https://doi.org/10.1016/j.ijms.2015.09.017" @default.
• W1929124472 hasPublicationYear "2015" @default.
• W1929124472 type Work @default.
• W1929124472 sameAs 1929124472 @default.
• W1929124472 citedByCount "7" @default.
• W1929124472 countsByYear W19291244722016 @default.
• W1929124472 countsByYear W19291244722017 @default.
• W1929124472 countsByYear W19291244722018 @default.
• W1929124472 countsByYear W19291244722019 @default.
• W1929124472 countsByYear W19291244722020 @default.
• W1929124472 countsByYear W19291244722022 @default.
• W1929124472 crossrefType "journal-article" @default.
• W1929124472 hasAuthorship W1929124472A5020965679 @default.
• W1929124472 hasAuthorship W1929124472A5035650109 @default.
• W1929124472 hasAuthorship W1929124472A5042730011 @default.
• W1929124472 hasAuthorship W1929124472A5052803675 @default.
• W1929124472 hasAuthorship W1929124472A5062555283 @default.
• W1929124472 hasAuthorship W1929124472A5066079599 @default.
• W1929124472 hasAuthorship W1929124472A5075557725 @default.
• W1929124472 hasAuthorship W1929124472A5083447932 @default.
• W1929124472 hasAuthorship W1929124472A5085823900 @default.
• W1929124472 hasAuthorship W1929124472A5086873823 @default.
• W1929124472 hasAuthorship W1929124472A5087243601 @default.
• W1929124472 hasConcept C107872376 @default.
• W1929124472 hasConcept C112570922 @default.
• W1929124472 hasConcept C113196181 @default.
• W1929124472 hasConcept C145148216 @default.
• W1929124472 hasConcept C162356407 @default.
• W1929124472 hasConcept C16291436 @default.
• W1929124472 hasConcept C178790620 @default.
• W1929124472 hasConcept C185592680 @default.
• W1929124472 hasConcept C18903297 @default.
• W1929124472 hasConcept C198291218 @default.
• W1929124472 hasConcept C43617362 @default.
• W1929124472 hasConcept C86803240 @default.
• W1929124472 hasConceptScore W1929124472C107872376 @default.
• W1929124472 hasConceptScore W1929124472C112570922 @default.
• W1929124472 hasConceptScore W1929124472C113196181 @default.
• W1929124472 hasConceptScore W1929124472C145148216 @default.
• W1929124472 hasConceptScore W1929124472C162356407 @default.
• W1929124472 hasConceptScore W1929124472C16291436 @default.
• W1929124472 hasConceptScore W1929124472C178790620 @default.
• W1929124472 hasConceptScore W1929124472C185592680 @default.
• W1929124472 hasConceptScore W1929124472C18903297 @default.
• W1929124472 hasConceptScore W1929124472C198291218 @default.
• W1929124472 hasConceptScore W1929124472C43617362 @default.
• W1929124472 hasConceptScore W1929124472C86803240 @default.
• W1929124472 hasLocation W19291244721 @default.
• W1929124472 hasLocation W19291244722 @default.
• W1929124472 hasLocation W19291244723 @default.
• W1929124472 hasOpenAccess W1929124472 @default.
• W1929124472 hasPrimaryLocation W19291244721 @default.
• W1929124472 hasRelatedWork W1970492643 @default.

• next