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- W1930449483 abstract "The objects of this paper focus on the fabrication and characterization of high sensitive silicon pressure sensors. In this experiment, the parameters which may influence the characteristics of sensors including the diaphragm thickness, piezoresistor layout, junction depth and environmental temperature are discussed. From the results of this experiment, it can be found that the diaphragm is thinner and the junction depth is shallower on" @default.
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- W1930449483 date "2005-08-25" @default.
- W1930449483 modified "2023-09-27" @default.
- W1930449483 title "The study of silicon pressure sensors fabrication" @default.
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- W1930449483 doi "https://doi.org/10.1109/edms.1994.771220" @default.
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