Matches in SemOpenAlex for { <https://semopenalex.org/work/W1930461320> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W1930461320 abstract "The possibility of using amorphous carbon as an encapsulant for integrated circuits is investigated. As this is a low-temperature plasma-deposited carbon film, low stresses result. This reduces the possibility of bond wire breakages and stress on the underlying film. Its low-temperature deposition, chemical inactivity, highly electrical insulating properties, and imperviousness to the passage of contaminating gases, liquids, and ions make it a suitable encapsulant for circuits. These properties also make it a potential replacement for silicon nitride. The possibility of using amorphous carbon as a wire encapsulant at interconnect level is also explored. >" @default.
- W1930461320 created "2016-06-24" @default.
- W1930461320 creator A5001978326 @default.
- W1930461320 creator A5038903084 @default.
- W1930461320 creator A5040222158 @default.
- W1930461320 creator A5072680252 @default.
- W1930461320 creator A5074822800 @default.
- W1930461320 date "2003-01-13" @default.
- W1930461320 modified "2023-09-26" @default.
- W1930461320 title "Low temperature plasma amorphous carbon encapsulation for reliable multilevel interconnections-with applications to wafer scale multichip packaging" @default.
- W1930461320 cites W1970805300 @default.
- W1930461320 cites W2020113318 @default.
- W1930461320 cites W2050103621 @default.
- W1930461320 cites W2055606813 @default.
- W1930461320 cites W2058865512 @default.
- W1930461320 cites W2087329515 @default.
- W1930461320 doi "https://doi.org/10.1109/vmic.1989.77996" @default.
- W1930461320 hasPublicationYear "2003" @default.
- W1930461320 type Work @default.
- W1930461320 sameAs 1930461320 @default.
- W1930461320 citedByCount "1" @default.
- W1930461320 crossrefType "proceedings-article" @default.
- W1930461320 hasAuthorship W1930461320A5001978326 @default.
- W1930461320 hasAuthorship W1930461320A5038903084 @default.
- W1930461320 hasAuthorship W1930461320A5040222158 @default.
- W1930461320 hasAuthorship W1930461320A5072680252 @default.
- W1930461320 hasAuthorship W1930461320A5074822800 @default.
- W1930461320 hasConcept C104779481 @default.
- W1930461320 hasConcept C121332964 @default.
- W1930461320 hasConcept C123745756 @default.
- W1930461320 hasConcept C140205800 @default.
- W1930461320 hasConcept C159985019 @default.
- W1930461320 hasConcept C160671074 @default.
- W1930461320 hasConcept C171250308 @default.
- W1930461320 hasConcept C178790620 @default.
- W1930461320 hasConcept C185592680 @default.
- W1930461320 hasConcept C192562407 @default.
- W1930461320 hasConcept C201931942 @default.
- W1930461320 hasConcept C2777431650 @default.
- W1930461320 hasConcept C31258907 @default.
- W1930461320 hasConcept C41008148 @default.
- W1930461320 hasConcept C49040817 @default.
- W1930461320 hasConcept C544956773 @default.
- W1930461320 hasConcept C56052488 @default.
- W1930461320 hasConcept C57410435 @default.
- W1930461320 hasConcept C62520636 @default.
- W1930461320 hasConcept C82706917 @default.
- W1930461320 hasConceptScore W1930461320C104779481 @default.
- W1930461320 hasConceptScore W1930461320C121332964 @default.
- W1930461320 hasConceptScore W1930461320C123745756 @default.
- W1930461320 hasConceptScore W1930461320C140205800 @default.
- W1930461320 hasConceptScore W1930461320C159985019 @default.
- W1930461320 hasConceptScore W1930461320C160671074 @default.
- W1930461320 hasConceptScore W1930461320C171250308 @default.
- W1930461320 hasConceptScore W1930461320C178790620 @default.
- W1930461320 hasConceptScore W1930461320C185592680 @default.
- W1930461320 hasConceptScore W1930461320C192562407 @default.
- W1930461320 hasConceptScore W1930461320C201931942 @default.
- W1930461320 hasConceptScore W1930461320C2777431650 @default.
- W1930461320 hasConceptScore W1930461320C31258907 @default.
- W1930461320 hasConceptScore W1930461320C41008148 @default.
- W1930461320 hasConceptScore W1930461320C49040817 @default.
- W1930461320 hasConceptScore W1930461320C544956773 @default.
- W1930461320 hasConceptScore W1930461320C56052488 @default.
- W1930461320 hasConceptScore W1930461320C57410435 @default.
- W1930461320 hasConceptScore W1930461320C62520636 @default.
- W1930461320 hasConceptScore W1930461320C82706917 @default.
- W1930461320 hasLocation W19304613201 @default.
- W1930461320 hasOpenAccess W1930461320 @default.
- W1930461320 hasPrimaryLocation W19304613201 @default.
- W1930461320 hasRelatedWork W1975865187 @default.
- W1930461320 hasRelatedWork W1985604287 @default.
- W1930461320 hasRelatedWork W2011327413 @default.
- W1930461320 hasRelatedWork W2012291247 @default.
- W1930461320 hasRelatedWork W2020868027 @default.
- W1930461320 hasRelatedWork W2055240365 @default.
- W1930461320 hasRelatedWork W2082433604 @default.
- W1930461320 hasRelatedWork W2096678685 @default.
- W1930461320 hasRelatedWork W2097205890 @default.
- W1930461320 hasRelatedWork W2133118090 @default.
- W1930461320 hasRelatedWork W2140576460 @default.
- W1930461320 hasRelatedWork W2154341184 @default.
- W1930461320 hasRelatedWork W2164630301 @default.
- W1930461320 hasRelatedWork W2269993369 @default.
- W1930461320 hasRelatedWork W2292801140 @default.
- W1930461320 hasRelatedWork W2534037105 @default.
- W1930461320 hasRelatedWork W2603809953 @default.
- W1930461320 hasRelatedWork W2997624991 @default.
- W1930461320 hasRelatedWork W33096308 @default.
- W1930461320 hasRelatedWork W2878879209 @default.
- W1930461320 isParatext "false" @default.
- W1930461320 isRetracted "false" @default.
- W1930461320 magId "1930461320" @default.
- W1930461320 workType "article" @default.