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- W193161917 abstract "Sputter coating is usually the method of choice for depositing thin films when non-planar substrates are involved. The higher gas pressure used in sputtering enhances the scattering of the coating flux, thus leading to a better step coverage. Coating uniformity is a major concern in experiments related to laser fusion. Vessel walls and bottom, called ground plane in this paper, affect coating nonuniformity. Any sputtered atoms hitting these surfaces will, in general, stick to them. This, in turn, may affect the flux distribution at the substrate if the two are close to each other. We have modeled the effect of the ground plane on the deposition uniformity on the substrate. We have also measured these effects experimentally and compared them to the results obtained from the model. 4 refs., 2 figs., 2 tabs." @default.
- W193161917 created "2016-06-24" @default.
- W193161917 creator A5047985761 @default.
- W193161917 creator A5054281329 @default.
- W193161917 creator A5062241298 @default.
- W193161917 date "1987-10-26" @default.
- W193161917 modified "2023-09-27" @default.
- W193161917 title "Analysis of sputter coating uniformity by computer modeling" @default.
- W193161917 hasPublicationYear "1987" @default.
- W193161917 type Work @default.
- W193161917 sameAs 193161917 @default.
- W193161917 citedByCount "0" @default.
- W193161917 crossrefType "journal-article" @default.
- W193161917 hasAuthorship W193161917A5047985761 @default.
- W193161917 hasAuthorship W193161917A5054281329 @default.
- W193161917 hasAuthorship W193161917A5062241298 @default.
- W193161917 hasConcept C111368507 @default.
- W193161917 hasConcept C119599485 @default.
- W193161917 hasConcept C120665830 @default.
- W193161917 hasConcept C121332964 @default.
- W193161917 hasConcept C121684516 @default.
- W193161917 hasConcept C127313418 @default.
- W193161917 hasConcept C127413603 @default.
- W193161917 hasConcept C134786449 @default.
- W193161917 hasConcept C151730666 @default.
- W193161917 hasConcept C159985019 @default.
- W193161917 hasConcept C171250308 @default.
- W193161917 hasConcept C17825722 @default.
- W193161917 hasConcept C19067145 @default.
- W193161917 hasConcept C191486275 @default.
- W193161917 hasConcept C191897082 @default.
- W193161917 hasConcept C192562407 @default.
- W193161917 hasConcept C21822782 @default.
- W193161917 hasConcept C22423302 @default.
- W193161917 hasConcept C2524010 @default.
- W193161917 hasConcept C2777289219 @default.
- W193161917 hasConcept C2781448156 @default.
- W193161917 hasConcept C2816523 @default.
- W193161917 hasConcept C33923547 @default.
- W193161917 hasConcept C41008148 @default.
- W193161917 hasConcept C61427134 @default.
- W193161917 hasConcept C64297162 @default.
- W193161917 hasConcept C68709404 @default.
- W193161917 hasConcept C88764893 @default.
- W193161917 hasConceptScore W193161917C111368507 @default.
- W193161917 hasConceptScore W193161917C119599485 @default.
- W193161917 hasConceptScore W193161917C120665830 @default.
- W193161917 hasConceptScore W193161917C121332964 @default.
- W193161917 hasConceptScore W193161917C121684516 @default.
- W193161917 hasConceptScore W193161917C127313418 @default.
- W193161917 hasConceptScore W193161917C127413603 @default.
- W193161917 hasConceptScore W193161917C134786449 @default.
- W193161917 hasConceptScore W193161917C151730666 @default.
- W193161917 hasConceptScore W193161917C159985019 @default.
- W193161917 hasConceptScore W193161917C171250308 @default.
- W193161917 hasConceptScore W193161917C17825722 @default.
- W193161917 hasConceptScore W193161917C19067145 @default.
- W193161917 hasConceptScore W193161917C191486275 @default.
- W193161917 hasConceptScore W193161917C191897082 @default.
- W193161917 hasConceptScore W193161917C192562407 @default.
- W193161917 hasConceptScore W193161917C21822782 @default.
- W193161917 hasConceptScore W193161917C22423302 @default.
- W193161917 hasConceptScore W193161917C2524010 @default.
- W193161917 hasConceptScore W193161917C2777289219 @default.
- W193161917 hasConceptScore W193161917C2781448156 @default.
- W193161917 hasConceptScore W193161917C2816523 @default.
- W193161917 hasConceptScore W193161917C33923547 @default.
- W193161917 hasConceptScore W193161917C41008148 @default.
- W193161917 hasConceptScore W193161917C61427134 @default.
- W193161917 hasConceptScore W193161917C64297162 @default.
- W193161917 hasConceptScore W193161917C68709404 @default.
- W193161917 hasConceptScore W193161917C88764893 @default.
- W193161917 hasLocation W1931619171 @default.
- W193161917 hasOpenAccess W193161917 @default.
- W193161917 hasPrimaryLocation W1931619171 @default.
- W193161917 hasRelatedWork W160534229 @default.
- W193161917 hasRelatedWork W1978620629 @default.
- W193161917 hasRelatedWork W1983454576 @default.
- W193161917 hasRelatedWork W2023814472 @default.
- W193161917 hasRelatedWork W2072289116 @default.
- W193161917 hasRelatedWork W2082856545 @default.
- W193161917 hasRelatedWork W2089736783 @default.
- W193161917 hasRelatedWork W2125193029 @default.
- W193161917 hasRelatedWork W2184563462 @default.
- W193161917 hasRelatedWork W2291943546 @default.
- W193161917 hasRelatedWork W2318197877 @default.
- W193161917 hasRelatedWork W2324530852 @default.
- W193161917 hasRelatedWork W2330155214 @default.
- W193161917 hasRelatedWork W2979943976 @default.
- W193161917 hasRelatedWork W3091053487 @default.
- W193161917 hasRelatedWork W3098093556 @default.
- W193161917 hasRelatedWork W3155554271 @default.
- W193161917 hasRelatedWork W3162765932 @default.
- W193161917 hasRelatedWork W3181611624 @default.
- W193161917 hasRelatedWork W626046501 @default.
- W193161917 isParatext "false" @default.
- W193161917 isRetracted "false" @default.
- W193161917 magId "193161917" @default.
- W193161917 workType "article" @default.