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- W1936633134 abstract "In this paper we describe the origin and characteristics of the defect structures in contemporary SIMOX and show how their densities are controlled by the processing method and conditions. >" @default.
- W1936633134 created "2016-06-24" @default.
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- W1936633134 date "2002-12-30" @default.
- W1936633134 modified "2023-09-26" @default.
- W1936633134 title "Effect of single vs. multiple implant processing on defect types and densities in SIMOX" @default.
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- W1936633134 doi "https://doi.org/10.1109/soi.1993.344598" @default.
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