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• W1938921576 abstract "A new fabrication process is described for high performance embedded or integrated inductors for power converters. The process includes etching V-grooves in a silicon substrate, depositing granular composite magnetic materials, and electroplating the copper conductors." @default.
• W1938921576 created "2016-06-24" @default.
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• W1938921576 date "2002-11-08" @default.
• W1938921576 modified "2023-10-16" @default.
• W1938921576 title "Fabrication of thin-film V-groove inductors using composite magnetic materials" @default.
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• W1938921576 doi "https://doi.org/10.1109/iwipp.2000.885191" @default.
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