Matches in SemOpenAlex for { <https://semopenalex.org/work/W1939174972> ?p ?o ?g. }
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- W1939174972 endingPage "16" @default.
- W1939174972 startingPage "8" @default.
- W1939174972 abstract "The problem of temperature control for rapid thermal processor(RTP) is considered in this paper. In RTP of semiconductor wafers, not only accurate control of the wafer temperature but also temperature uniformity through the whole wafer are essential. RTP model considered in this paper is highly nonlinear due to its thermal properties. A robust controller is designed for this RTP model using an H_∞ two degree-of-freedom controller design method, and it is shown that the controller designed performs good tracking and temperature uniformity over a wide range of operating temperatures. Application of the controller to one of manufacturing processes(i.e. oxide growth process) is also investigated in accordance with its temperature profile and seems to be good. Finally, controller reduction is considered, showing possibility of the use of reduced-order controller." @default.
- W1939174972 created "2016-06-24" @default.
- W1939174972 creator A5014750722 @default.
- W1939174972 creator A5060455551 @default.
- W1939174972 creator A5063082026 @default.
- W1939174972 creator A5085060723 @default.
- W1939174972 date "1997-02-01" @default.
- W1939174972 modified "2023-09-27" @default.
- W1939174972 title "A Robust Controller Design for Uniform Temperature Control of Nonlinear Multivariable Rapid Thermal Processor" @default.
- W1939174972 cites W1893565476 @default.
- W1939174972 cites W1911875002 @default.
- W1939174972 cites W2216843752 @default.
- W1939174972 hasPublicationYear "1997" @default.
- W1939174972 type Work @default.
- W1939174972 sameAs 1939174972 @default.
- W1939174972 citedByCount "6" @default.
- W1939174972 crossrefType "journal-article" @default.
- W1939174972 hasAuthorship W1939174972A5014750722 @default.
- W1939174972 hasAuthorship W1939174972A5060455551 @default.
- W1939174972 hasAuthorship W1939174972A5063082026 @default.
- W1939174972 hasAuthorship W1939174972A5085060723 @default.
- W1939174972 hasConcept C111919701 @default.
- W1939174972 hasConcept C117312493 @default.
- W1939174972 hasConcept C121332964 @default.
- W1939174972 hasConcept C127413603 @default.
- W1939174972 hasConcept C133731056 @default.
- W1939174972 hasConcept C153294291 @default.
- W1939174972 hasConcept C154945302 @default.
- W1939174972 hasConcept C158622935 @default.
- W1939174972 hasConcept C160671074 @default.
- W1939174972 hasConcept C192562407 @default.
- W1939174972 hasConcept C203479927 @default.
- W1939174972 hasConcept C204530211 @default.
- W1939174972 hasConcept C2775924081 @default.
- W1939174972 hasConcept C41008148 @default.
- W1939174972 hasConcept C47446073 @default.
- W1939174972 hasConcept C49040817 @default.
- W1939174972 hasConcept C536315585 @default.
- W1939174972 hasConcept C62520636 @default.
- W1939174972 hasConcept C6557445 @default.
- W1939174972 hasConcept C72832162 @default.
- W1939174972 hasConcept C86803240 @default.
- W1939174972 hasConcept C98045186 @default.
- W1939174972 hasConceptScore W1939174972C111919701 @default.
- W1939174972 hasConceptScore W1939174972C117312493 @default.
- W1939174972 hasConceptScore W1939174972C121332964 @default.
- W1939174972 hasConceptScore W1939174972C127413603 @default.
- W1939174972 hasConceptScore W1939174972C133731056 @default.
- W1939174972 hasConceptScore W1939174972C153294291 @default.
- W1939174972 hasConceptScore W1939174972C154945302 @default.
- W1939174972 hasConceptScore W1939174972C158622935 @default.
- W1939174972 hasConceptScore W1939174972C160671074 @default.
- W1939174972 hasConceptScore W1939174972C192562407 @default.
- W1939174972 hasConceptScore W1939174972C203479927 @default.
- W1939174972 hasConceptScore W1939174972C204530211 @default.
- W1939174972 hasConceptScore W1939174972C2775924081 @default.
- W1939174972 hasConceptScore W1939174972C41008148 @default.
- W1939174972 hasConceptScore W1939174972C47446073 @default.
- W1939174972 hasConceptScore W1939174972C49040817 @default.
- W1939174972 hasConceptScore W1939174972C536315585 @default.
- W1939174972 hasConceptScore W1939174972C62520636 @default.
- W1939174972 hasConceptScore W1939174972C6557445 @default.
- W1939174972 hasConceptScore W1939174972C72832162 @default.
- W1939174972 hasConceptScore W1939174972C86803240 @default.
- W1939174972 hasConceptScore W1939174972C98045186 @default.
- W1939174972 hasIssue "2" @default.
- W1939174972 hasLocation W19391749721 @default.
- W1939174972 hasOpenAccess W1939174972 @default.
- W1939174972 hasPrimaryLocation W19391749721 @default.
- W1939174972 hasRelatedWork W1508037983 @default.
- W1939174972 hasRelatedWork W1893565476 @default.
- W1939174972 hasRelatedWork W1911875002 @default.
- W1939174972 hasRelatedWork W1953325964 @default.
- W1939174972 hasRelatedWork W2101207470 @default.
- W1939174972 hasRelatedWork W2108343485 @default.
- W1939174972 hasRelatedWork W2204055477 @default.
- W1939174972 hasRelatedWork W2210402652 @default.
- W1939174972 hasRelatedWork W2215168984 @default.
- W1939174972 hasRelatedWork W2218303493 @default.
- W1939174972 hasRelatedWork W2218904304 @default.
- W1939174972 hasRelatedWork W2255331936 @default.
- W1939174972 hasRelatedWork W2257429185 @default.
- W1939174972 hasRelatedWork W2266525236 @default.
- W1939174972 hasRelatedWork W2270139155 @default.
- W1939174972 hasRelatedWork W2545686151 @default.
- W1939174972 hasRelatedWork W2991797336 @default.
- W1939174972 hasRelatedWork W1905275148 @default.
- W1939174972 hasRelatedWork W1939294385 @default.
- W1939174972 hasRelatedWork W1959031986 @default.
- W1939174972 hasVolume "2" @default.
- W1939174972 isParatext "false" @default.
- W1939174972 isRetracted "false" @default.
- W1939174972 magId "1939174972" @default.
- W1939174972 workType "article" @default.