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- W1940406881 abstract "Fe and Ti implantations were performed into n- and p- type InAlAs, respectively. Fe implants suffered a strong out-diffusion during annealing, whereas Ti implants showed only a slight in- and out- diffusion. The crystalline quality of the annealed material was very close to that of the virgin un-implanted sample, and resistivities higher than 10/sup 6/ /spl Omega/-cm were obtained. MeV Ti implantations were performed into p-type InP. The Ti implant profiles showed almost no redistribution during annealing and the material had good crystalline quality after annealing. Resistivities near the intrinsic limit for InP were obtained. >" @default.
- W1940406881 created "2016-06-24" @default.
- W1940406881 creator A5009767568 @default.
- W1940406881 creator A5021008422 @default.
- W1940406881 creator A5028828734 @default.
- W1940406881 creator A5073105839 @default.
- W1940406881 date "2002-12-30" @default.
- W1940406881 modified "2023-09-25" @default.
- W1940406881 title "Fe and Ti compensation implants into n- and p- In/sub 0.52/Al/sub 0.48/A and p- InP" @default.
- W1940406881 cites W2036256944 @default.
- W1940406881 cites W2042557200 @default.
- W1940406881 cites W2064305018 @default.
- W1940406881 cites W2074802022 @default.
- W1940406881 doi "https://doi.org/10.1109/iciprm.1993.380640" @default.
- W1940406881 hasPublicationYear "2002" @default.
- W1940406881 type Work @default.
- W1940406881 sameAs 1940406881 @default.
- W1940406881 citedByCount "0" @default.
- W1940406881 crossrefType "proceedings-article" @default.
- W1940406881 hasAuthorship W1940406881A5009767568 @default.
- W1940406881 hasAuthorship W1940406881A5021008422 @default.
- W1940406881 hasAuthorship W1940406881A5028828734 @default.
- W1940406881 hasAuthorship W1940406881A5073105839 @default.
- W1940406881 hasConcept C113196181 @default.
- W1940406881 hasConcept C145148216 @default.
- W1940406881 hasConcept C17744445 @default.
- W1940406881 hasConcept C178790620 @default.
- W1940406881 hasConcept C185592680 @default.
- W1940406881 hasConcept C191897082 @default.
- W1940406881 hasConcept C192562407 @default.
- W1940406881 hasConcept C199539241 @default.
- W1940406881 hasConcept C2777855556 @default.
- W1940406881 hasConcept C41823505 @default.
- W1940406881 hasConcept C43617362 @default.
- W1940406881 hasConcept C49040817 @default.
- W1940406881 hasConcept C506065880 @default.
- W1940406881 hasConcept C74080474 @default.
- W1940406881 hasConcept C94625758 @default.
- W1940406881 hasConceptScore W1940406881C113196181 @default.
- W1940406881 hasConceptScore W1940406881C145148216 @default.
- W1940406881 hasConceptScore W1940406881C17744445 @default.
- W1940406881 hasConceptScore W1940406881C178790620 @default.
- W1940406881 hasConceptScore W1940406881C185592680 @default.
- W1940406881 hasConceptScore W1940406881C191897082 @default.
- W1940406881 hasConceptScore W1940406881C192562407 @default.
- W1940406881 hasConceptScore W1940406881C199539241 @default.
- W1940406881 hasConceptScore W1940406881C2777855556 @default.
- W1940406881 hasConceptScore W1940406881C41823505 @default.
- W1940406881 hasConceptScore W1940406881C43617362 @default.
- W1940406881 hasConceptScore W1940406881C49040817 @default.
- W1940406881 hasConceptScore W1940406881C506065880 @default.
- W1940406881 hasConceptScore W1940406881C74080474 @default.
- W1940406881 hasConceptScore W1940406881C94625758 @default.
- W1940406881 hasLocation W19404068811 @default.
- W1940406881 hasOpenAccess W1940406881 @default.
- W1940406881 hasPrimaryLocation W19404068811 @default.
- W1940406881 hasRelatedWork W1499619127 @default.
- W1940406881 hasRelatedWork W1578048106 @default.
- W1940406881 hasRelatedWork W1968749204 @default.
- W1940406881 hasRelatedWork W1976252060 @default.
- W1940406881 hasRelatedWork W1982045272 @default.
- W1940406881 hasRelatedWork W1997027246 @default.
- W1940406881 hasRelatedWork W2001593728 @default.
- W1940406881 hasRelatedWork W2007582575 @default.
- W1940406881 hasRelatedWork W2028833392 @default.
- W1940406881 hasRelatedWork W2042557200 @default.
- W1940406881 hasRelatedWork W2052483678 @default.
- W1940406881 hasRelatedWork W2062932133 @default.
- W1940406881 hasRelatedWork W2071779562 @default.
- W1940406881 hasRelatedWork W2077240909 @default.
- W1940406881 hasRelatedWork W2085682623 @default.
- W1940406881 hasRelatedWork W2094393955 @default.
- W1940406881 hasRelatedWork W2107879549 @default.
- W1940406881 hasRelatedWork W2108556380 @default.
- W1940406881 hasRelatedWork W2148593275 @default.
- W1940406881 hasRelatedWork W2542027154 @default.
- W1940406881 isParatext "false" @default.
- W1940406881 isRetracted "false" @default.
- W1940406881 magId "1940406881" @default.
- W1940406881 workType "article" @default.