Matches in SemOpenAlex for { <https://semopenalex.org/work/W1941762011> ?p ?o ?g. }
- W1941762011 abstract "A single beam laser interferometer based on a modified Mirau detection scheme with a vertical resolution of ∼5 pm was developed for localized d33 measurements on patterned piezoelectric films. The tool provides high spatial resolution (∼2 μm), essential for understanding scaling and processing effects in piezoelectric materials. This approach enables quantitative information on d33, currently difficult in local measurement techniques such as piezoresponse force microscopy. The interferometer is built in a custom microscope and employs a phase lock-in technique in order to detect sub-Angstrom displacements. d33 measurements on single crystal 0.67PbMg0.33Nb0.67O3-0.33PbTiO3 and bulk PbZrTiO3-5A ceramics demonstrated agreement within <3% with measurements using a double beam laser interferometer. Substrate bending contributions to out-of-plane strain, observed in thin continuous PbZr0.52Ti0.48O3 films grown on Si substrates is reduced for electrode diameters smaller than 100 μm. Direct scanning across room temperature and 150 °C poled 5 μm and 10 μm features etched in 0.5 μm thick PbZr0.52Ti0.48O3 films doped with 1% Nb confirmed minimal substrate contributions to the effective d33,f. Furthermore, enhanced d33,f values were observed along the feature edges due to partial declamping from the substrate, thus validating the application of single beam interferometry on finely patterned electrodes." @default.
- W1941762011 created "2016-06-24" @default.
- W1941762011 creator A5032028141 @default.
- W1941762011 creator A5033411952 @default.
- W1941762011 creator A5052221811 @default.
- W1941762011 creator A5065116029 @default.
- W1941762011 date "2015-11-04" @default.
- W1941762011 modified "2023-10-03" @default.
- W1941762011 title "Quantitative and high spatial resolution d<sub>33</sub> measurement of piezoelectric bulk and thin films" @default.
- W1941762011 cites W1964096427 @default.
- W1941762011 cites W1967387790 @default.
- W1941762011 cites W1968975890 @default.
- W1941762011 cites W1976061480 @default.
- W1941762011 cites W1976307977 @default.
- W1941762011 cites W1978067677 @default.
- W1941762011 cites W1983738927 @default.
- W1941762011 cites W1984883891 @default.
- W1941762011 cites W1985879218 @default.
- W1941762011 cites W1989477614 @default.
- W1941762011 cites W1995657576 @default.
- W1941762011 cites W1998597644 @default.
- W1941762011 cites W2008690853 @default.
- W1941762011 cites W2011409554 @default.
- W1941762011 cites W2014520866 @default.
- W1941762011 cites W2018409502 @default.
- W1941762011 cites W2020268591 @default.
- W1941762011 cites W2020660911 @default.
- W1941762011 cites W2022510071 @default.
- W1941762011 cites W2030544651 @default.
- W1941762011 cites W2031377119 @default.
- W1941762011 cites W2031460290 @default.
- W1941762011 cites W2031989159 @default.
- W1941762011 cites W2033651539 @default.
- W1941762011 cites W2034558832 @default.
- W1941762011 cites W2037663341 @default.
- W1941762011 cites W2040087456 @default.
- W1941762011 cites W2045721946 @default.
- W1941762011 cites W2046104316 @default.
- W1941762011 cites W2050154841 @default.
- W1941762011 cites W2051184600 @default.
- W1941762011 cites W2058570649 @default.
- W1941762011 cites W2060964422 @default.
- W1941762011 cites W2064716270 @default.
- W1941762011 cites W2065473156 @default.
- W1941762011 cites W2068579447 @default.
- W1941762011 cites W2070671355 @default.
- W1941762011 cites W2074213151 @default.
- W1941762011 cites W2074869505 @default.
- W1941762011 cites W2075756786 @default.
- W1941762011 cites W2077208271 @default.
- W1941762011 cites W2077217057 @default.
- W1941762011 cites W2084854805 @default.
- W1941762011 cites W2089499759 @default.
- W1941762011 cites W2097821463 @default.
- W1941762011 cites W2117484565 @default.
- W1941762011 cites W2122419368 @default.
- W1941762011 cites W2124179422 @default.
- W1941762011 cites W2128421349 @default.
- W1941762011 cites W2136770309 @default.
- W1941762011 cites W2143666585 @default.
- W1941762011 cites W2154831337 @default.
- W1941762011 cites W2317735644 @default.
- W1941762011 doi "https://doi.org/10.1063/1.4935140" @default.
- W1941762011 hasPublicationYear "2015" @default.
- W1941762011 type Work @default.
- W1941762011 sameAs 1941762011 @default.
- W1941762011 citedByCount "21" @default.
- W1941762011 countsByYear W19417620112017 @default.
- W1941762011 countsByYear W19417620112018 @default.
- W1941762011 countsByYear W19417620112019 @default.
- W1941762011 countsByYear W19417620112020 @default.
- W1941762011 countsByYear W19417620112022 @default.
- W1941762011 countsByYear W19417620112023 @default.
- W1941762011 crossrefType "journal-article" @default.
- W1941762011 hasAuthorship W1941762011A5032028141 @default.
- W1941762011 hasAuthorship W1941762011A5033411952 @default.
- W1941762011 hasAuthorship W1941762011A5052221811 @default.
- W1941762011 hasAuthorship W1941762011A5065116029 @default.
- W1941762011 hasConcept C100082104 @default.
- W1941762011 hasConcept C111368507 @default.
- W1941762011 hasConcept C120665830 @default.
- W1941762011 hasConcept C121332964 @default.
- W1941762011 hasConcept C127313418 @default.
- W1941762011 hasConcept C133386390 @default.
- W1941762011 hasConcept C138268822 @default.
- W1941762011 hasConcept C154945302 @default.
- W1941762011 hasConcept C159985019 @default.
- W1941762011 hasConcept C166689943 @default.
- W1941762011 hasConcept C171250308 @default.
- W1941762011 hasConcept C172436747 @default.
- W1941762011 hasConcept C185592680 @default.
- W1941762011 hasConcept C19067145 @default.
- W1941762011 hasConcept C192562407 @default.
- W1941762011 hasConcept C205372480 @default.
- W1941762011 hasConcept C2777289219 @default.
- W1941762011 hasConcept C41008148 @default.
- W1941762011 hasConcept C49040817 @default.
- W1941762011 hasConcept C520434653 @default.
- W1941762011 hasConcept C67649825 @default.
- W1941762011 hasConcept C73922627 @default.