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Matches in SemOpenAlex for { <https://semopenalex.org/work/W1941770566> ?p ?o ?g. }

• W1941770566 abstract "It has been shown using SIMS and X-ray diffraction that, during annealing, the surface-oriented mass transport of nitrogen implanted into silicon is affected by interstitial radiation defects. The mass transport is much more intense after high temperature implantation and becomes predominant if the substrate was preliminarily bombarded with argon ions." @default.
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• W1941770566 date "2002-12-24" @default.
• W1941770566 modified "2023-09-25" @default.
• W1941770566 title "The effect of radiation defects on the localization of nitrogen implanted into silicon" @default.
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• W1941770566 doi "https://doi.org/10.1109/iit.1996.586496" @default.
• W1941770566 hasPublicationYear "2002" @default.
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